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Evaporation mask, evaporation system and material purification method

A technology of masking and evaporation, applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve the problems of increased cost and waste in panel factories, achieve the maintenance of background vacuum and improve utilization efficiency, and the effect of maintaining cleanliness

Active Publication Date: 2015-08-19
SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Traditional coating equipment mostly adopts single-point evaporation source technology, and its material utilization rate is only 5%. In other words, after 100 grams of organic light-emitting materials enter the equipment using single-point evaporation source technology, only 5 grams can be actually applied into the AMOLED panel, and the remaining 95% of the material is wasted in the manufacturing process, which will undoubtedly increase the cost for the panel factory

Method used

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  • Evaporation mask, evaporation system and material purification method
  • Evaporation mask, evaporation system and material purification method
  • Evaporation mask, evaporation system and material purification method

Examples

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Embodiment 1

[0050] ginseng figure 1 As shown, the evaporation system includes an evaporation source 11 , a heater 12 for heating the evaporation source, and an evaporation mask 13 located above the evaporation source 11 .

[0051] The evaporation source 11 is an organic small molecule material.

[0052] Evaporation mask 13 adopts glass, quartz, magnesium fluoride (MgF 2 ) or calcium fluoride (CaF 2 ) and other materials with the same thermal expansion coefficient as the heating substrate or below it as an evaporation mask. The evaporation mask 13 is placed on the evaporation source, the main body is a tubular structure, and its cross section is circular. figure 2 shown. The evaporation mask 13 includes an opening 131 .

[0053] ginseng image 3 As shown, in other embodiments, the opening 131 is also covered with a shielding part 132, and the shielding part 132 shields part of the space of the opening 131, which is used to control the radiation angle of the evaporated substance from t...

Embodiment 2

[0058] ginseng Figure 5 As shown, the evaporation system includes an evaporation source 21 , a heater 22 for heating the evaporation source, and an evaporation mask 23 located above the evaporation source 21 .

[0059] The evaporation source 21 is an organic small molecule material.

[0060] Evaporation mask 23 adopts glass, quartz, magnesium fluoride (MgF 2 ) or calcium fluoride (CaF 2 ) and other materials with the same thermal expansion coefficient as the heating substrate or below it as an evaporation mask. The evaporation mask 23 is placed on the evaporation source, the main body is a tubular structure, and its cross section is rectangular. Figure 6 shown. The evaporation mask 23 includes an opening 231 .

[0061] ginseng Figure 7 As shown, in other embodiments, the opening 231 is also covered with a shielding portion 232, and the shielding portion 232 shields part of the space of the opening 231, which is used to control the radiation angle of the evaporated sub...

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Abstract

The invention discloses an evaporation shade which is arranged between an evaporation source and a substrate. The evaporation shade comprises a tubular main body part which comprises an opening part, and a blocking part partially blocking the opening part and used for controlling the radiation angle of an evaporation material from the evaporation source at the opening part. The invention also discloses an evaporation system and a purification method of material. The evaporation shade can not only control the radiation angle of the evaporation material, but also purify and collect the evaporation material, thus saving materials.

Description

technical field [0001] The invention relates to an evaporation mask, a system using the mask and a material purification method using the evaporation mask. Background technique [0002] The evaporation process is widely used in the production process of electronic devices, such as organic electroluminescent devices (OLEDs), and in organic electroluminescent displays or OLED lighting panels, each organic light-emitting unit is made by evaporation process. Usually, an anode composed of a transparent electrode such as indium tin oxide (ITO) and a cathode composed of a metal electrode with a low work function such as aluminum, magnesium or calcium alloy are arranged on a substrate (such as glass). Organic materials such as an organic functional layer and a light-emitting layer are deposited between the two electrodes at one time; wherein, the organic light-emitting layer and the metal electrode are both formed by vapor deposition. [0003] Traditional coating equipment mostly a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/12
Inventor 廖良生丁磊周东营
Owner SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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