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Method for vaporizing fluidized organic materials

An organic substance and fluidization technology, applied in vacuum evaporation coating, coating, sputtering coating, etc., can solve problems such as changes in the geometry of steam pipes, reduce the risk of decomposition, stabilize evaporation rate, and stabilize heating The effect of device temperature

Active Publication Date: 2007-03-21
GLOBAL OLED TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Other limitations of prior art evaporation sources are changes in the geometry of the steam pipes as the organic material feed is consumed

Method used

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  • Method for vaporizing fluidized organic materials
  • Method for vaporizing fluidized organic materials
  • Method for vaporizing fluidized organic materials

Examples

Experimental program
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Embodiment Construction

[0028] Reference is now made to Figure 1 which shows a cross-sectional view of one embodiment of the device of the present disclosure. The evaporation device 5 is a device for evaporating organic substances to the surface of the substrate to form a thin film, and includes a permeable first member 40, a pipe 60, and a metering device, which refers to the organic substance in the form of fluidized powder or provides fluidization. The powder form of the organic substance is measured, and the fluidized powder flow is directed to the device of the permeable first part 40. The permeable first part 40 may be part of the pipe 60. The pipe 60 also includes one or more holes 90. The evaporation device 5 also includes one or more protective covers 70.

[0029] In one embodiment, the container 45 is a container that receives a certain amount of organic matter in powder form. In this embodiment, the metering valve 55 includes a device for fluidizing the organic substance and metering the organ...

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Abstract

A method for vaporizing organic materials onto a surface, to form a film includes providing a quantity of organic material in a fluidized powdered form; metering the powdered organic material and directing a stream of such fluidized powder onto a first member; heating the first member so that as the stream of fluidized powder is vaporized; collecting the vaporized organic material in a manifold; and providing a second member formed with at least one aperture in communication with the manifold that permits the vaporized organic material to be directed onto the surface to form a film.

Description

Invention field [0001] The present invention relates to the field of physical vapor deposition, in which a source material is heated to a certain temperature to cause evaporation and generate a vapor stream to form a thin film on the surface of a substrate. Background of the invention [0002] An organic light emitting diode (OLED) device includes a substrate, an anode, a hole transport layer prepared from an organic compound, an organic light emitting layer containing appropriate dopants, an organic electron transport layer, and a cathode. Because of low driving voltage, high brightness, wide viewing angle and full-color flat light emitting display, OLED devices have attracted people's attention. Tang et al. described such multilayer OLED devices in U.S. Patent Nos. 4,769,292 and 4,885,211. [0003] Physical vapor deposition in a vacuum environment is the main method for depositing thin films of organic substances for small molecule OLED devices. Such meth...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/00C23C14/24C23C14/12
CPCC23C14/228C23C14/246Y10S427/101C23C14/12C23C14/00
Inventor M·朗D·R·斯特里普J·M·格雷斯D·R·弗里曼N·P·雷登B·E·克佩
Owner GLOBAL OLED TECH
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