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Vacuum coating machine evaporation crucible

A vacuum coating machine and crucible technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of material splashing, uneven heating of evaporated material, etc., to avoid condensation and realize evaporation rate. Effect

Inactive Publication Date: 2016-12-14
铜陵市铜创电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the defects in the prior art and provide an evaporation crucible of a vacuum coating machine to solve the defects caused by the deposition and condensation of evaporated materials at the evaporation port of the crucible and the splashing of materials to the film caused by uneven heating inside the crucible.

Method used

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  • Vacuum coating machine evaporation crucible

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Embodiment Construction

[0017] In order to have a further understanding and understanding of the structural features of the present invention and the achieved effects, the preferred embodiments and accompanying drawings are used for a detailed description, as follows:

[0018] An evaporation crucible of a vacuum coating machine, comprising a housing chamber 1 for accommodating heated materials, a heating chamber 2 surrounding the periphery of the housing chamber 1, and an outer wall 3 surrounding the heating chamber 2, the heating chamber 2. In order from top to bottom, there are upper heating unit 4 for ensuring that the temperature of the evaporation port of the crucible is higher than the freezing point of the evaporation material and independent temperature control, and a lower heating unit 5 located on the periphery of the crucible for independent temperature control. The top of the heating chamber 2 There is a flow channel 6 for the heated material to pass through, the top of the flow channel 6 ...

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Abstract

The invention provides a vacuum coating machine evaporation crucible. The vacuum coating machine evaporation crucible comprises an accommodating cavity for accommodating heated materials, a heating cavity surrounding the periphery of the accommodating cavity and an outer wall enclosing the heating cavity; the heating cavity is sequentially provided with an upper heating unit and a lower heating unit from top to bottom, wherein the upper heating unit is used for ensuring the effect that the temperature of an evaporating opening is higher than the condensation point of evaporated materials, the temperature of the upper heating unit is controlled separately, the lower heating unit is located on the periphery of the crucible, and the temperature of the lower heating unit is controlled separately; the top of the heating cavity is provided with a runner used for allowing the heated materials to pass, and the top end of the runner is provided with an opening; the diameter of the two ends of the runner is larger than that of the middle of the runner; and the diameter of the end, provided with the opening, of the runner is smaller than the inner diameter of the accommodating cavity. The vacuum coating machine evaporation crucible has the beneficial effects that the temperatures of different parts of the crucible are convenient to control through design of two heat supply systems, the temperature of the top of the crucible is slightly higher than the evaporating temperature of the materials, and thus material condensation can be avoided; and the stability of the evaporating speed of the materials is achieved by precisely controlling the evaporating temperature.

Description

technical field [0001] The invention relates to the technical field of metallized film manufacturing, in particular to an evaporation crucible of a vacuum coating machine. Background technique [0002] With the development of modern film science and technology, especially the large-scale industrial application of metallized films for capacitors and packaging, a huge film production and film processing industry has been formed in the world. The demand for household appliances, electrical appliances, electronic products, and packaging products is increasing rapidly, which leads to an increasing demand for metallized films, resulting in an increasingly urgent demand for high-efficiency, high-performance, and multi-functional film evaporation equipment. [0003] Thin film evaporation equipment integrates multidisciplinary technologies such as machinery, vacuum, coating, refrigeration, and automatic control. It evaporates aluminum or zinc onto plastic film substrates through high...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/26
CPCC23C14/243C23C14/26
Inventor 沈艺辉
Owner 铜陵市铜创电子科技有限公司
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