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Crucible type evaporator source used for film plating machines in organic electrofluorescence type

A coating machine and electroluminescence technology, applied in the field of evaporation sources, can solve the problems of troublesome operation, inconvenient replacement of coating materials, short lifespan of evaporation sources, etc., and achieve the effect of facilitating filling and changing materials

Inactive Publication Date: 2003-07-23
JILIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The evaporation source of this evaporation method has short life, low voltage, high power, difficult to control, unstable evaporation rate, serious mutual pollution between multiple sources, and it is inconvenient to replace the coating material, and the evaporation source needs to be replaced frequently, which is very troublesome to operate.
In addition, the vacuum chamber matched with this evaporation source must be an open vacuum chamber, that is, a bell-type vacuum chamber. This kind of vacuum chamber is not only troublesome to operate, but also must make its interior completely exposed to the atmosphere every time it is operated, that is, Source and substrate will be thoroughly contaminated
However, the organic electroluminescent coating needs to be carried out under high vacuum conditions, avoiding contact with water and oxygen, so as to improve the service life. Therefore, this traditional bell-type coating evaporation method is basically not suitable for the increasingly advanced and perfect organic Electromechanical Luminescence Coater System

Method used

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  • Crucible type evaporator source used for film plating machines in organic electrofluorescence type
  • Crucible type evaporator source used for film plating machines in organic electrofluorescence type
  • Crucible type evaporator source used for film plating machines in organic electrofluorescence type

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Embodiment Construction

[0014] The following takes the growth process of the double-layer green OLED device as an example to illustrate the use of the crucible evaporation source of the organic electroluminescence coating machine.

[0015] The material is ITO / NPB(60nm) / Alq(40nm) / Al(100nm), the steps are as follows:

[0016] 1. Load the used organic materials (Alq and NPB) into a quartz crucible;

[0017] 2. Put Alq and NPB crucibles into the No. 3 and No. 4 furnaces of this equipment respectively. There are a total of

[0018] 5 furnaces, respectively marked as furnace No. 1-5;

[0019] 3. Fix the processed ITO glass sheet to the substrate holder;

[0020] 4. Fix the substrate holder on the rotating system in the equipment through the slot;

[0021] 5. Close the large baffle below the substrate and the small baffle above the crucible;

[0022] 6. Close the opening of the system and turn on the mechanical pump to draw a low vacuum;

[0023] 7. When the vacuum reaches 100Pa, turn on the molecula...

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Abstract

A crucible-type evaporator for the machine used to plate electroluminescent organic film is composed of supporting base, temp-measuring thermocuple system, crucible, and heating furnace which consists of upper and lower No.95 ceramic rings, cylindrical quartz glass as internal shielding layer, cylindrical stainless steel as external shielding layer, and Mo wire embedded in the inner surfaces of two ceramic rings. Its advantages are long service life, good temp control, stable evaporating speed, and high thermal insulating performance.

Description

Technical field: [0001] The invention relates to an evaporation source of a coating machine, in particular to a crucible-type evaporation source applied to an organic electroluminescence coating machine. Background technique: [0002] At present, the existing organic electroluminescent coating machines in China basically follow the traditional bell-type coating machine, which uses the evaporation method of hanging wire or boat-type metal crucible. The evaporation source of this evaporation method has short life, low voltage, high power, difficult to control, unstable evaporation rate, serious mutual pollution between multiple sources, and it is inconvenient to replace the coating material, and the evaporation source needs to be replaced frequently, which is very troublesome to operate. In addition, the vacuum chamber matched with this evaporation source must be an open vacuum chamber, that is, a bell-type vacuum chamber. This kind of vacuum chamber is not only troublesome to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/12C23C14/26
Inventor 侯晶莹刘立宁赵毅李传南高强高文宝程刚刘式墉
Owner JILIN UNIV
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