Evaporating device and evaporating method

A technology of evaporation and evaporation source, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of large range of plating rate jump, unstable plating rate monitoring, false plating rate, etc. The effect of achieving a stable evaporation rate
CN107779822AActive Publication Date: 2018-03-09SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
Publication Date
2018-03-09

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Abstract

The invention provides an evaporating device and an evaporating method. According to the evaporating device disclosed by the invention, a crystal oscillator sheet baffle plate is arranged between an evaporation source and a crystal oscillator sheet, and the crystal oscillator sheet baffle plate can switch between two positions, namely a position shielding the crystal oscillator sheet and a position not shielding the crystal oscillator sheet; when the crystal oscillator sheet baffle plate is in the position shielding the crystal oscillator sheet, evaporation material deposits to the crystal oscillator sheet baffle plate, so as to prevent the evaporation material from depositing to the crystal oscillator sheet; and when the crystal oscillator sheet baffle plate is in the position not shielding the crystal oscillator sheet, the evaporation material deposits to the crystal oscillator sheet. When the evaporation device disclosed by the invention is applied to an evaporation process, in theinitial stage of evaporation, namely the evaporation stage of impurities on the surface of to-be-evaporated material, the crystal oscillator sheet baffle plate is in the position shielding the crystaloscillator sheet, so as to prevent impurities from depositing to the surface of the crystal oscillator sheet; and after evaporation of the impurities on the surface of the to-be-evaporated material is completed, the crystal oscillator sheet baffle plate is in the position not shielding the crystal oscillator sheet, and the evaporation material deposits to the surface of the crystal oscillator sheet, so that an evaporation rate monitoring device acquires a steady evaporation rate.
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Description

technical field

[0001] The invention relates to the field of display technology, in particular to an evaporation device and an evaporation method. Background technique

[0002] Vacuum evaporation is an important thin film forming technology, which is widely used in industrial fields such as displays, electronic circuits, optics, and molds. For example, in organic light-emitting diode (OLED) display technology, organic materials are processed by vacuum evaporation. Film formation with metal materials to produce OLED components.

[0003] The basic process of evaporation is as follows: the evaporation material is placed in the crucible of the evaporation chamber, and the chamber is evacuated to a certain degree of vacuum (E -5 After Pa), the crucible is heated to make the evaporation material reach a certain temperature, and the gas molecules of the evaporation material are ejected from the crucible, deposited on the substrate to form a target film, and also deposited on the c...

Claims

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