Evaporation system

A technology of evaporation and vaporization, which is applied in the field of evaporation system to achieve the effect of improving product yield, maintaining evaporation rate and reducing cost

Active Publication Date: 2017-07-14
HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the current evaporation system still needs to be improved

Method used

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Embodiment Construction

[0043] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0044] In the description of the present invention, the orientations or positional relationships indicated by the terms "upper", "lower" and the like are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and do not require that the present invention must be based on a specific Azimuth configuration and operation, therefore, should not be construed as limiting the invention.

[0045] In one aspect of the present invention, the pr...

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Abstract

The invention discloses an evaporation system. The evaporation system comprises a feeding device, a feed port, a discharge port, a pushing unit, an evaporation device and a storage device, wherein the feeding device includes a feeding device shell; feeding space is defined in the feeding device shell; the feed port is formed in the feeding device shell; the discharge port is formed in the feeding device shell and far from the feed port; at least one part of the pushing unit is embedded in the feeding space for pushing raw materials in the feeding space to move from the feed port to the discharge port; the evaporation device is connected with the feeding device; and the storage device is connected with the feed port of the feeding device. The evaporation system has at least one of the following advantages: the evaporation system can realize continuous feeding to improve the production efficiency; and the continuous feeding guarantees better consistency of the raw materials and no residues of the raw materials, and can keep stable evaporation speed.

Description

technical field [0001] The present invention relates to the field of organic photoelectric devices, in particular to an evaporation system. Background technique [0002] Organic devices have been widely used in the industrial field of organic semiconductors, and evaporation technology is an important process in the process of preparing organic devices. At present, the mainstream preparation process of organic light-emitting diodes (OLEDs) is evaporation technology. Evaporation technology mainly uses the principle of thermal evaporation to heat and vaporize organic materials and metal materials to form layers of organic thin films. and the cathode, thereby preparing an OLED device. [0003] With the development of large-size OLEDs, the volume of the organic evaporation chamber is also increasing. Therefore, more stringent requirements are put forward for the volume and vacuum degree of the organic evaporation chamber. In the current vacuum evaporation equipment, after each ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/12C23C14/24C23C14/54H01L51/56
CPCC23C14/12C23C14/246C23C14/542C23C14/548H10K71/164C23C14/26C23C14/543H10K2102/311
Inventor 邹清华
Owner HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD
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