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Manufacturing method of inkjet head

A manufacturing method and technology of an ink jet head, applied in the direction of printing, etc., can solve the problems of many steps, complicated processes, damage to the chamber and nozzle holes, etc., and achieve the effect of simplifying the process steps, improving the yield, and not easily damaged.

Active Publication Date: 2016-10-26
DALIAN UNIV OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the process of processing, the process is complicated and there are many steps, and it is easy to cause damage to the chamber and nozzle hole when removing the resist layer

Method used

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  • Manufacturing method of inkjet head
  • Manufacturing method of inkjet head
  • Manufacturing method of inkjet head

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] Please refer to figure 1 , the embodiment of the present invention provides a method for manufacturing an inkjet head, the specific steps are as follows:

[0026] Please refer to figure 2 , step S101 , disposing the vibrating plate 202 on the lower surface of the substrate 201 .

[0027] Preferably, the vibrating plate 202 is made of silicon nitride material to improve the elasticity of the vibrating plate 202 and improve the vibration effect. Of course, the vibrating plate 202 can also be made of silicon dioxide or zirconia material.

[0028] Please refer to image 3 , Step S102 , setting a piezoelectric actuator 203 on the surface of the vibrating plate 202 .

[0029] Wherein the piezoelectric actuator 203 may include piezoelectric ceramics, an upper electrode and a lower electrode, and the piezoelectric actuator 203 is a driving element, which converts an applied voltage into mechanical energy, so that the vibrating plate 202 moves up and down and is formed in a ...

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PUM

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Abstract

The present invention provides a method for manufacturing an ink jet head and an ink jet head. The method includes: arranging a vibrating plate on lower surface of a substrate; arranging a piezoelectric actuator on surface of the vibrating plate; arranging a protective film on surface of the piezoelectric actuator for sealing the piezoelectric actuator along with the vibrating plate, thus preventing the piezoelectric actuator from corrosion; etching the substrate and the vibrating plate to form a groove on the substrate at a position corresponding to the piezoelectric actuator, and form a liquid feeding hole on the substrate and vibrating plate; forming a pressure chamber and a nozzle orifice on lower surface of the vibrating plate, allowing the pressure chamber to cover the position where the piezoelectric actuator is arranged in the vibrating plate, enabling communication of the pressure chamber with the nozzle orifice and the liquid feeding hole.

Description

technical field [0001] The invention relates to printing equipment technology, in particular to a method for manufacturing an inkjet head and the inkjet head. Background technique [0002] An inkjet printhead is a device for printing an image of a predetermined color by ejecting a small amount of ink droplets at a desired position on a recording board. There are two driving methods for the inkjet print head: one is the thermal drive method in which the inkjet print head ejects ink droplets using the bubble expansion force generated by the heating source in the ink; the other is the inkjet print head through the piezoelectric body. The deformation creates pressure on the ink, which ejects an ink droplet. [0003] Complex and precise ink flow paths must be formed inside piezoelectric inkjet printheads. Chinese patent CN200410031366.1 discloses a manufacturing method of an inkjet head, wherein a pressure chamber and a nozzle plate are first formed on a silicon substrate, and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/16B41J2/14
CPCB41J2/14233B41J2/161B41J2/1623B41J2/1626B41J2/1631B41J2/1639B41J2/1642B41J2/1646B41J2002/14241B41J2002/1437Y10T29/42Y10T29/49083Y10T29/49401
Inventor 邹赫麟孙莎周毅
Owner DALIAN UNIV OF TECH