Anti-static device and panel display manufacturing equipment
A technology for flat panel display and manufacturing equipment, applied in electrostatic, electrical components, instruments, etc., to achieve the effect of low cost, easy maintenance, and avoidance of electrostatic damage
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Embodiment 1
[0056] An embodiment of the present invention provides an antistatic method used in the field of flat panel display manufacturing, such as figure 1 As shown, the method mainly includes: blowing the gas 11 containing ions to the bottom surface 101 of the substrate 10, the bottom surface 101 is the surface where the substrate 10 is in contact with the flat panel display manufacturing equipment, such as figure 1 The lower surface of the substrate 10 shown in.
[0057] During the flat panel display manufacturing process, the flat panel display manufacturing equipment such as alignment machines, manipulators, etc. need to frequently contact, attach and separate the substrate (the substrate in this embodiment is used to collectively refer to the display panel and its semi-finished products), which will Static electricity is accumulated due to friction. In order to solve this problem, in this embodiment, when it is necessary to remove static electricity or prevent static electricity ...
Embodiment 2
[0061] An embodiment of the present invention provides an antistatic device for use in the field of flat panel display manufacturing, such as figure 1 and 2 As shown, the antistatic device includes: an adjustable air supply system (not shown in the figure), which is used to provide compressed air; a plurality of air outlets 21, and the compressed air provided by the adjustable air supply system passes through the air outlet 21 to The bottom surface 101 of the substrate 10 blows air, and the bottom surface is the surface where the substrate 10 is in contact with the flat panel display manufacturing equipment; the discharge needle 22 is arranged in the air outlet 21, and is used to ionize the air passing through the vicinity of the discharge needle 22 needle tip by discharge, so as to discharge The gas blown by the tuyere 21 contains ions.
[0062] Static electricity is generally generated when substrates and flat-panel display manufacturing equipment rub against each other dur...
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