Preparation method of porous diamond film

Abstract

The invention discloses a preparation method of a porous diamond film. The preparation method of the porous diamond film comprises the following steps: putting a silicon substrate into a microwave-plasma chemical vapour deposition device, wherein a Pt metal film is plated on the surface of the silicon substrate as a catalyst; controlling the vacuum degree to be 10-30 millibars, introducing a working gas, loading a carbon source to a microwave-plasma generating region, and heating to 750-850 DEG C; depositing to obtain a blocky diamond film; calcining the film in the air atmosphere at the temperature of 500-600 DEG C, thus obtaining the porous diamond film. The preparation method of the porous diamond film has the advantages that no template is needed, no complex pre-treatment process or high temperature process is needed, metal pollution can be avoided, and a treatment process is further simplified.

Description

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AI Technical Summary

Benefits of technology

In this new process called Microwaves Plasmas (MWP), there're two ways we use it - one involves placing an SiC wafer inside a chamber where certain gases like oxygen or nitrogen mix together under high pressure conditions at very low temperatures. Another way involve introducing special chemical molecules such as dimethyltin chloride onto the SiC wafers before they have been treated by various methods like thermal treatment processes. These techniques help create tiny holes within the crystal lattices of the material, which makes them more accessible than other materials due to their larger size compared to traditional manufacturing methods. By controllably increasing the amount of impurities during these treatments, pore structures may become even better.

Problems solved by technology

This patents describes different ways to improve the performance of electronic devices such as transistors due to increased demand from various industries like manufacturing processes related to electronics. One approach involves improving the quality and durability of these products through improved techniques involving reducing impurities content during fabrications while maintaining good electrical conductivity and reduced costs associated therewith. Another solution includes developing new types of ceramic materials called amorphous calcium nitride (ACN)). Among them, ACNPs show promise towards better environmentally friendly solutions compared to other options.

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