Cross multi-degree-of-freedom ultrasonic motor

Abstract

The invention relates to a cross multi-degree-of-freedom ultrasonic motor. The ultrasonic motor comprises a stator and a mover, wherein the mover is a spherical metal body; the integral structure of the stator is cross; a square blind hole is formed in the center of the stator; the stator is divided into a rear drive foot, a right drive foot, a front drive foot and a left drive foot; four piezoelectric ceramic wafers are asymmetrically attached to the four drive feet of the stator, are as wide as the drive feet, have the length smaller than the length of the drive feet and are connected with corresponding signal input ends respectively; the diameter of the mover is greater than the width of the square blind hole in the center of the stator; the stator and the mover have certain contact pressure in vertical direction and are in friction transmission. The ultrasonic motor can realize rotation around three axes, and has the characteristics of compact structure, few members, easiness in miniaturization and the like.

Description

technical field [0001] The invention relates to a cross-shaped multi-degree-of-freedom ultrasonic motor, which belongs to the field of ultrasonic motors. Background technique [0002] The working principle of the multi-degree-of-freedom ultrasonic motor is to use the inverse piezoelectric effect of the piezoelectric material to excite the slight vibration of the stator in the ultrasonic frequency range, and convert the vibration into the rotation or linear motion of the mover through friction, output power, drive load. The structure of the ultrasonic motor is simple, and the stator directly drives the movement of the mover. Compared with the traditional electromagnetic motor, the complicated transmission mechanism in the middle can be omitted, and it has significant advantages such as low cost and small size. In addition, it has the characteristics of low speed and high torque, high precision, fast response, and no interference from magnetic fields, so it has broad applicat...

AI Technical Summary

Problems solved by technology

[0006] 1. The rod-type multi-degree-of-freedom motor amplifies the vibration through the long rod. In order to increase the amplification rate of the amplitude, the rod length needs to have a certain length. Therefore, it is difficult to reduce the size of the rod length direction

[0007] 2. The piezoelectric element of the rod motor is at the bottom, and the energy is transmitted through the long rod. The longer the rod is, the more serious the energy attenuation is, which is not conducive to the improvement of the thrust of the motor.

[0008] 3. The multi-degree-of-freedom ultrasonic motor with annular stator is driven by three stators to rotate the rotor. It has many parts and complex structure, and requires high precision in manufacturing, processing and assembly.

At the same time, each stator requires a set of drive circuits, and two or three stators are required to cooperate with each other, which requires high control.

[0009] 4. The annular stator multi-degree-of-freedom ultrasonic motor is composed of three sets of stator elements, the overall volume is large, and it is difficult to miniaturize

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