A high-precision pressure drive device
A driving device, high-precision technology, applied in piezoelectric/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of lack of linearity, loss, etc., and achieve excellent response speed , easy closed-loop control, easy-to-manufacture effects
Inactive Publication Date: 2017-01-18
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
[0005] In addition, in some special applications, such as the transmissive deformable mirror, its control point is not consistent with the position of the displacement target point, and the direct displacement drive of the displacement driver loses its due significance, and compared with the pressure driver, it is also Lack of linear characteristics for easy control
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[0038] The present invention will be further described below in conjunction with the drawings and specific embodiments.
[0039] figure 1 It is a structure diagram of a high-precision pressure driving device, including: piezoelectric ceramic 1, direction guide groove 2, elastic reed 3, micro-displacement detector 4, and mounting base 5.
[0040] figure 2 It is a positive and second measurement view of a high-precision pressure driving device, with image 3 It is an exploded diagram of a high-precision pressure drive device with incomplete positive and second measurement, attached Figure 4 It is a complete exploded view of a high-precision pressure driving device.
[0041] The piezoelectric ceramic 1 is placed in the direction guide groove 2. There is an opening 201 at the upper end of the direction guide groove 2. The upper end 101 of the piezoelectric ceramic 1 can partially extend from the opening 201, and there is also an opening at the lower end of the direction guide groove 2. ...
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The invention relates to a high-precision pressure driving device. The device comprises piezoelectric ceramic (1), a direction guide groove (2), an elastic leaf spring (3), a micro displacement detector (4) and an installation base (5), wherein the piezoelectric ceramic is placed in the direction guide groove, the upper end of the direction guide groove is provided with a hole, the upper end of the piezoelectric ceramic can partially stretch out of the hole, and the lower end of the direction guide groove is also provided with a hole used for being connected with the installation base. The piezoelectric ceramic is used for conducting ultra-micro and ultra-rapid displacement, and the elastic leaf spring is used for bearing the acting force of the piezoelectric ceramic and generating corresponding elastic deformation. The device can output constant acting force accurately and rapidly under the condition that constantly-changing micro displacement exists at an acting force output end. Because direct output of the device is the acting force, and a linear relation exists between object deformation and the acting force, the device can conduct linear control over a controlled plane and control the plane shape more accurately.
Description
Technical field [0001] The invention relates to the technical field of piezoelectric driving, in particular to a high-precision pressure driving device. Background technique [0002] Adaptive optics have been important applications in controllable laser nuclear fusion systems, astronomical observation systems and medical imaging systems. In the adaptive optics system, the deformable mirror is an indispensable key component. Its function is to correct the wave phase difference of the optical system in real time through its own surface topography to achieve better imaging quality. The piezoelectric drive unit is the core unit of the deformable mirror, and its working mode and performance are directly related to the surface shape control ability of the deformable mirror, which in turn affects the imaging quality of the entire adaptive optics system. [0003] In order to enable the deformable mirror to obtain a complex surface shape, it is often necessary to use a large number of pie...
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IPC IPC(8): H02N2/02H02N2/04
Inventor 李云付韬韬王安定谢伟民邢廷文
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI