Device and method for in-situ collection of induced current induced by cathodoluminescence and electron beam

Abstract

The invention provides an in-situ collection device for cathodoluminescence and electron beam-induced induced current, which includes a test bench, a probe, a probe fixing device and an objective lens. The test bench is used to place a test sample, and the probe is fixed on the probe fixing device. , used to contact with the electrode of the test sample to collect the induced current signal induced by the electron beam, the objective lens is used to focus the electron beam, and the device also includes a cathode fluorescence probe, which is arranged between the probe and the objective lens for conducting For the collection of cathodoluminescent signals, the test sample is located at the focal point of the cathodoluminescence probe. The present invention has the advantages that the cathodoluminescent probe is located between the probe and the objective lens, and the test sample is located at the focal position of the cathodoluminescent probe, so that the vertical distance from the probe body of the probe to the surface of the test sample is less than the distance from the focus of the cathodoluminescent probe to the The distance of the cathodoluminescence probe realizes the simultaneous acquisition of the cathodofluorescence signal and the electron beam-induced current signal in the same micro-area of ​​the test sample.

Description

technical field [0001] The invention relates to the field of semiconductor device testing, in particular to a device and method for in-situ collecting current induced by cathode fluorescence and electron beams. Background technique [0002] The cathodoluminescence spectrometer and the electron beam induced current device are two accessories mounted on the scanning electron microscope. Because the cathodoluminescence spectrometer uses an electron beam excitation source with a beam spot size of only a few nanometers, it can perform spectral collection and imaging of nanostructures in materials and devices, which has played a huge role in revealing local optical properties at the micro-nano scale. impetus. The current cathodoluminescent spectrometer still relies on imports from abroad, and there is no domestic manufacturer to produce it. In order to further expand the spatial resolution and spectral resolution of cathodofluorescence spectrometers, most cathodofluorescence spe...

AI Technical Summary

Problems solved by technology

This has two disadvantages: 1. The screw fixing the probe is a few mm higher than the surface of the sample stage, causing the probe to be several mm higher than the surface of the sample. Generally, the probe is 3mm higher than the surface of the sample stage. Since the focus of the CL probe is located at The CL probe is about 1mm below the CL probe, so when the CL probe collects optical signals, it is best to be about 1mm away from the sample surface, so that the sample is at the focus of the CL probe, which can improve the fluorescence collection efficiency

However, since the probe is several mm higher than the sample surface, the CL probe cannot be moved directly above the sample, resulting in in-situ acquisition of CL / EBIC.

2. Since it is necessary to manually adjust the screw in the external environment to control the movement of the probe, only one sample can be tested in one cycle of vacuuming and venting of the electron microscope. If the next sample needs to be tested, the electron microscope needs to be Empty, manually adjust the position of the probe, which obviously cannot meet the needs of R & D institutions for a large number of failure analysis and will cause a waste of resources

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