Air washing device

Abstract

The invention discloses an air washing device. The air washing device comprises a water spraying device, wherein the water spraying device comprises a water pipe and a plurality of nozzles arranged on the water pipe; the atomization angle of each nozzle is 180 degrees and the diameters of sprayed water drops are more than or equal to 150 microns; water curtains formed by the nozzles on the water spraying device completely cover one section of an air pipeline; the water curtains formed by the water spraying device are vertical to an air flowing direction; the nozzles on the water spraying device can be arranged with at least two positions in an air moving direction to form a front and back staggered row structure; and the water curtains formed by the adjacent nozzles do not collide with each other. The atomization angle of each nozzle is 180 degrees and the formed water curtains are vertical to the air flowing direction to form an air and water drop impacting type active type contact structure, so that the problems of a bypass region of the sector-shaped nozzles in the prior art are solved, and the whole device has an extremely high water washing effect.

Description

technical field [0001] The present invention relates to an air washing device, in particular to an air washing device which effectively removes bad gases (such as sulfides, nitrides, etc.) in the air so as to make the air meet the cleanliness requirements of the clean room. Background technique [0002] In the manufacturing process of the chip, not only need to control the temperature and humidity accurately, but also need to meet the dust-free standard and avoid being interfered by chemical substances. Therefore, in order to achieve the standard of dust-free cleanliness, it is necessary to control the air quality. In the prior art, there is a repurposed washing equipment in the clean room, which not only needs to remove the bad gas in the air, but also needs to provide appropriate humidity to prevent electrostatic induction due to the air being too dry. In addition, it also needs to provide Appropriate temperature to meet the conditions required for production. [0003] T...

AI Technical Summary

Problems solved by technology

However, since this active structure adopts a fan-shaped nozzle, its spray angle is generally only 120 degrees at most, so a bypass area 1 appears above the nozzle, see the attached figure 1 As shown, even if the structure of double or multiple rows of nozzles at the front and rear is adopted, the above problems cannot be solved, resulting in poor washing effect of the structure.

[0004] In view of the above problems, there are also people who design the spraying direction of the fan-shaped nozzle and the direction of the air flow into an opposite structure, as the invention patent application CN101164663A discloses a kind of air washing equipment, but the front of the nozzle must be provided with a filter plate for retaining water, Prevent water from spraying out of the recovery base, which not only makes the structure of the whole equipment more complicated, but also the extra filter plate will generate greater wind resistance, which increases the power supply demand of the whole equipment

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