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A high-performance light-to-heat conversion multi-element alloy nitride thin film and its preparation method

A technology of high-entropy alloys and nitride ceramics, which is applied in metal material coating technology, ion implantation plating, coating, etc., and can solve problems such as decreased bonding force, decreased optical properties, and peeling

Active Publication Date: 2017-08-25
安徽科鑫光热技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

According to the Carnot cycle efficiency, the larger the temperature difference, the higher the conversion efficiency. In order to improve the light-to-heat conversion efficiency, the coating is required to be used at a higher temperature. Chemical reactions lead to a decrease in bonding force or even peeling off, and a sharp drop in optical properties

Method used

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  • A high-performance light-to-heat conversion multi-element alloy nitride thin film and its preparation method
  • A high-performance light-to-heat conversion multi-element alloy nitride thin film and its preparation method
  • A high-performance light-to-heat conversion multi-element alloy nitride thin film and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] The composition is 1:1:1:1 equimolar ratio NbTiAlSi quaternary alloy target, using vacuum magnetron sputtering coating process, filled with working gas Ar and reactive gas N 2 , by changing the working pressure and sputtering time to obtain uniform multi-element alloy nitride films with different thicknesses. Specifically include the following steps:

[0030] Step 1: Put the quartz glass sheet (to facilitate the film thickness test) and the polished stainless steel substrate into alcohol and deionized water for 15 minutes, and repeat the above process twice;

[0031] Step 2: Dry the cleaned substrate and place it on the sample stage corresponding to the vacuum chamber, place the prepared quaternary alloy target on the evaporation source of the vacuum chamber and connect it to a DC power supply;

[0032] Step 3: Close the magnetron sputtering vacuum chamber, when the vacuum degree is lower than 1.0×10 -3 Pa, filled with 16sccm of Ar and 8sccm of N 2 ;

[0033] Step 4...

Embodiment 2

[0036] The composition is 1:1:1:1 equimolar ratio NbTiAlSi quaternary alloy target, using vacuum magnetron sputtering coating process, filled with working gas Ar and reactive gas N 2 , by changing the working pressure and sputtering time to obtain uniform multi-element alloy nitride films with different thicknesses. Specifically include the following steps:

[0037] Step 1: Put the quartz glass sheet (to facilitate the film thickness test) and the polished stainless steel substrate into alcohol and deionized water for 15 minutes, and repeat the above process twice;

[0038] Step 2: Dry the cleaned substrate and place it on the sample stage corresponding to the vacuum chamber, place the prepared quaternary high-entropy alloy target on the evaporation source of the vacuum chamber and connect it to a DC power supply;

[0039] Step 3: Close the magnetron sputtering vacuum chamber, when the vacuum degree is lower than 1.0×10 -3 Pa, filled with 20sccm of Ar and 6sccm of N 2 ;

...

Embodiment 3

[0044] The composition is 1:1:1:1 equimolar ratio NbTiAlSi quaternary high-entropy alloy target, using vacuum magnetron sputtering coating process, filled with working gas Ar and reaction gas N 2 , by changing the working pressure and sputtering time to obtain uniform high-entropy alloy nitride films with different thicknesses. Specifically include the following steps:

[0045] Step 1: Put the quartz glass sheet (to facilitate the film thickness test) and the polished stainless steel substrate into alcohol and deionized water for 15 minutes, and repeat the above process twice;

[0046] Step 2: Dry the cleaned substrate and place it on the sample stage corresponding to the vacuum chamber, place the prepared quaternary alloy target on the evaporation source of the vacuum chamber and connect it to a DC power supply;

[0047] Step 3: Close the magnetron sputtering vacuum chamber, when the vacuum degree is lower than 1.0×10 -3 Pa, filled with 16sccm of Ar and 8sccm of N 2 ;

[...

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Abstract

A high-performance photothermal conversion multi-element alloy nitride film and preparation method thereof. The multi-element alloy sputtering target was successfully prepared by powder metallurgy and vacuum arc melting method, and the vacuum magnetron sputtering coating process was adopted to pass the Multi-element alloy nitride films with different thicknesses were prepared by changing the sputtering time and working pressure, which provided new materials for solar spectrum selective absorption coatings. Typical structure of solar selective absorption coating: infrared reflection layer, double absorption layer, anti-reflection layer sandwich structure, the coating has higher absorption rate and thermal stability. The invention sputters a single-layer multi-element alloy nitride film on the polished stainless steel substrate, and the single-layer multi-element alloy nitride film has a higher absorption rate than other single-layer photothermal conversion films in the solar spectrum range after testing. 79.82%, and the obtained multi-element alloy nitride film has a uniform thickness, and has good bonding ability with the substrate and high temperature resistance. The invention is suitable for high-temperature vacuum heat collecting tubes and has broad application prospects in the field of solar light and heat.

Description

technical field [0001] The invention relates to the field of solar photothermal application, and mainly relates to a high-performance photothermal conversion multi-element alloy thin film and a preparation method thereof. Background technique [0002] With the growing problems of energy shortage and environmental pollution, it is imperative to expand the field of solar energy applications. Solar energy is a kind of clean renewable energy. Photothermal conversion is the most effective form of direct utilization of solar energy. The solar spectrum selective absorption coating is a medium that directly converts sunlight and light energy. Improving the conversion efficiency of solar energy has always been an important issue. The focus of solar thermal utilization. At present, solar spectrum selective absorption coatings for photothermal conversion are only used at medium and low temperatures. Among them, black chromium coatings and aluminum anodized coatings are the most mature...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35
Inventor 张勇盛文杰杨潇刘颖芳贺亚星史家兴朱洁王聪
Owner 安徽科鑫光热技术有限公司
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