Phase-shift and phase-tilt switchable dual-mode interferometric measurement device and measurement method thereof
A technology of interferometry and measurement methods, applied in the direction of measuring devices, interference spectroscopy, and measurement optics, can solve the problems of high price, high requirements for optical-mechanical realization, and complex structure, and achieve low cost, easy structure realization, and Improve the effect of the scope of application
Active Publication Date: 2017-09-22
NANJING UNIV OF SCI & TECH
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However, its structure is complex, the requirements for optical machine realization are very high, and the price is expensive.
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Embodiment 1
[0071] In phase tilt test mode:
[0072] The displacement adjustment device performs equal interval translation adjustment on the position of the reference mirror to obtain four phase-shifted interferograms, as shown in Figure 4 shown. The phase shift of each interferogram is π / 2, and the sampling resolution of the interferogram is 1024×1024 pixels.
[0073] Using the four-step phase-shifting algorithm to restore the two-dimensional distribution of the phase, the results are as follows: Figure 5 (b) shown. The test result is PV=0.2164λ, rms=0.0413λ.
[0074] In phase tilt test mode:
[0075] (1) The first seven steps of the displacement adjustment device still perform phase shift stepping, and the interferometer collects seven interferograms I with a small number of fringes and unequal phase tilts n (x,y), such as figure 2 (a), 2(b), 2(c), 2(d), 2(e), 2(f), 2(g). The last step is to adjust the tilt of the reference mirror [25] to obtain the high carrier frequency ref...
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The invention provides a phase-shifting and phase-tilting switchable dual-mode interference measuring device and a measuring method thereof, and relates to the field of light interference measuring and testing. The method comprises the following steps: first, a displacement adjusting device is mounted at a reference mirror of an interference instrument, wherein the displacement adjusting device can be used for shifting or tilting the reference mirror; and then, the interference instrument adopts a phase shifting test mode and a phase tilting test mode. In the phase shifting test mode, the displacement adjusting device shifts the reference mirror at equal intervals to obtain four phase shifting interferograms of which the amount of phase shift is Pai / 2, the interference instrument detects and receives the interferograms and transmits the interferograms to a computer, and the computer recovers a measured phase of a sample to be measured by a four-step phase shifting algorithm. In the phase tilting test mode, the displacement adjusting device propels and tilts the reference mirror, the interference instrument detects and receives more than six interferograms and transmits the interferograms to the computer, and the computer recovers the measured phase of the sample to be measured by a phase tilting interference algorithm. The phase-shifting and phase-tilting switchable dual-mode interference measuring device of the invention has a simple structure, and can be used to obtain high-accuracy interference measurement information in a vibration measurement environment.
Description
technical field [0001] The invention relates to the field of laser interference testing, in particular to a phase-shift and phase-tilt switchable dual-mode interferometric measurement device and a measurement method thereof, which can overcome environmental vibration interference. Background technique [0002] Interferometry is a very useful technique in optical testing, which obtains the phase distribution through digital processing of fringes. In order to achieve high-precision phase extraction, phase shifting interferometry PSI (Phase Shifting Interferometry) technology is usually used. In the standard PSI technique, it is necessary to use a phase shifter to shift the interferometric phase at equal intervals, and the shift amount is usually π / 2. As a result, many phase shift calculation methods have been formed, which are widely used in various interference test occasions. [0003] Phase shift interferometry In order to achieve equal interval phase shift, strict phase c...
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IPC IPC(8): G01J9/02G01J3/45
Inventor 李建欣刘成淼郭仁慧沈华马骏朱日宏陈磊何勇高志山王青
Owner NANJING UNIV OF SCI & TECH