The invention discloses a
microstructure rapid measurement method suitable for
white light scanning interference, and the
algorithm comprises the steps: controlling piezoelectric ceramics to carry out
time sequence vertical scanning within a certain scanning length according to a micro step
pitch through a
software program of an upper computer, and collecting and storing one interferogram in a computer when each step is moved; carrying out adaptive median filtering
processing on the stored
time sequence interferogram; finding out the position of the maximum
light intensity value of each pixel point in the
time sequence interferogram by adopting a hypersymmetric search method, recording the frame number of the interferogram where the position is located, and preliminarily calculating the height information of the morphology according to a related formula; and extracting phase information of the interference fringes by using a seven-step phase shift
algorithm, and unwrapping according to a related formula in combination with a preliminary calculation result to accurately recover the
microstructure of the tested sample. The method solves the problems that
noise singular point interference and adjacent pixel point
phase change cannot exceed 2pi in a phase shift
algorithm, effectively reduces the influence caused by scanning errors, and has the characteristics of high
measurement precision,
simple algorithm, high applicability and the like.