3D morphology recovery method combining phase shift interference with vertical scanning interference

A technology of vertical scanning and recovery method, which is applied in the direction of measuring devices, instruments, and optical devices, etc. It can solve the problems of unresolved phase and jump, and achieve the effect of high-precision 3D shape recovery, simple algorithm and high precision.

Inactive Publication Date: 2017-05-31
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • 3D morphology recovery method combining phase shift interference with vertical scanning interference
  • 3D morphology recovery method combining phase shift interference with vertical scanning interference
  • 3D morphology recovery method combining phase shift interference with vertical scanning interference

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[0032] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in combination with specific examples and with reference to the accompanying drawings.

[0033] Such as figure 1 As shown, the present invention is a 3D shape recovery method combining phase shift interference and vertical scanning interference, which specifically includes the following steps:

[0034] Step S1: Control the vertical scanning of the piezoelectric ceramic micro-step distance σ through the host computer program, and convert the interferogram collected by scanning at each step into a digital signal and store it in the computer;

[0035] Step S2: For interference fringes with different height values, use the extreme value method to judge the position of the maximum light intensity of each pixel in the interferogram, which is the zero optical path difference position corresponding to the pixel point; t...

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Abstract

The invention discloses a 3D morphology recovery method combining phase shift interference with vertical scanning interference, and the method comprises the steps: controlling piezoelectric ceramic microstep vertical scanning through an upper computer program, converting an interference pattern collected by each scanning step into a digital signal, and storing the digital signal in a computer; discriminating the position of the maximum light intensity of each pixel in the interference pattern as a zero optical path difference position corresponding to the pixel through employing the extremum method, recording the number of a frame where the zero optical path difference position is located, and preliminarily calculating the height information of morphology according to correlated formulas; extracting the phase information of interference fringes through employing a five-step phase shift method, combining with a preliminary calculation result, and precisely recovering the 3D morphology according to correlated formulas. The method solves a problem that the phase change between the adjacent pixels cannot exceed 2*phi in a phase shift algorithm, is high in measurement precision, is simple in algorithm and is high in practicality.

Description

technical field [0001] The invention belongs to the technical field of optical measurement engineering, and in particular relates to a 3D shape restoration method combining phase shift interference (PSI) and vertical scanning interference (VSI) Background technique [0002] The development of microelectronics, microstructure, and MEMS devices has higher and higher requirements for the surface quality and surface morphology of objects. Therefore, the precision requirements for 3D micro-nano structure detection are getting higher and higher, and the research on various 3D shape restoration algorithms is particularly important. In the process of surface topography measurement, the PSI method is usually used to process the obtained multiple interference fringes. The corresponding phase shift algorithm is used to obtain the phase value, and then the three-dimensional shape of the side is obtained. This method has high measurement accuracy and fast measurement speed. However, t...

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 谢仲业周毅陈楚怡邓钦元邓茜唐燕赵立新胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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