Microlens array-based synchronized phase-shifting interference test method and test device

A technology of microlens array and synchronous phase shifting, which is applied in measuring devices, measuring optics, optical radiation measurement, etc., can solve the problems of difficulty and high cost

Inactive Publication Date: 2012-06-20
NANJING UNIV OF SCI & TECH
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Problems solved by technology

The spatial position relationship of the phase-shifting interferogram obtained by this scheme is known and unique, but the pixel mask device needs to be fabricated using a photolithography process that requires extremely high precision, which is very difficult and expensive

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  • Microlens array-based synchronized phase-shifting interference test method and test device
  • Microlens array-based synchronized phase-shifting interference test method and test device
  • Microlens array-based synchronized phase-shifting interference test method and test device

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Embodiment Construction

[0016] The steps of the present invention are as follows:

[0017] Step 1: Obtain a pair of reference light and test light with orthogonal polarization directions in the Tieman interference test light path;

[0018] Step 2: Phase shifting by means of wavefront division, that is, making the pair of reference light and test light with orthogonal polarization directions obtained in step 1 pass through a 1 / 4 wave plate to become a pair of orthogonal circularly polarized light; The wavefronts of this pair of orthogonal circularly polarized light are divided, and the divergent light path formed on each sub-wavefront introduces different phase shifts through a four-quadrant polarizer group, and then the divergent light paths are converged by a main lens. Finally received by the detector;

[0019] Step 3: Rearrange the data obtained by the detector to obtain four phase-shifted interferograms, and then use the four-step phase-shift algorithm to restore the measured phase.

[0020] to...

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Abstract

The invention provides a microlens array-based synchronized phase-shifting interference test method and test device, relating to the field of optical interferometry test. The method comprises the following steps of: firstly, obtaining a pair of reference light and test light from a Twyman type interference testing light path, wherein the polarization directions of the reference light and the testlight are orthogonal; secondly, using a microlens array for carrying out phase shift by using a wavefront splitting method, wherein optical interference signals are received by a detector; and finally, rearranging data obtained by the detector so obtain four phase-shifted interferograms, wherein the tested phases can be recovered by using a universal four-step phase-shifting algorithm. The relative spatial position relationship of the four phase-shifted interferograms obtained by the method provided by the invention is known and unique, position matching errors cannot be generated, and the cost is lower.

Description

technical field [0001] The invention relates to the field of optical interferometric measurement testing, in particular to a method and device for synchronous phase-shifting interference testing using a microlens array. Background technique [0002] Phase-shifting interferometry is a widely used optical surface shape testing technology today. This technology uses an interferometer to collect a set of phase-shifting interferograms, each of which has a specific phase difference. According to the interferograms, the measured phase can be recovered. Traditional phase-shifting interferometry collects phase-shifting interferograms sequentially over a period of time, so its test accuracy is affected by time-varying environmental factors such as vibration. In order to overcome this problem, a synchronous phase-shifting interferometric test system that can obtain a set of phase-shifting interferograms at the same time and in different spatial positions was invented. [0003] The exi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02
Inventor 李建欣李博陈磊朱日宏何勇沈华郭仁慧乌兰图雅李金鹏
Owner NANJING UNIV OF SCI & TECH
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