Unlock instant, AI-driven research and patent intelligence for your innovation.

Vacuum transmission control system

A control system and vacuum transmission technology, applied in the field of control, can solve the problems of expensive clean room environment space, large clean room space, and large industrial computer, and achieve the effects of reduced space, easy maintenance and compact structure

Inactive Publication Date: 2015-05-20
SHENYANG SIASUN ROBOT & AUTOMATION
View PDF7 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The industrial computer itself is large in size, and the two independent controllers (ie industrial computer) also complicate the maintenance work and occupy a large space in the clean room, and the clean room environment space is very expensive

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Vacuum transmission control system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0022] like figure 1 As shown, a vacuum transfer control system includes:

[0023] The upper-level scheduling control module is used to run the upper-level scheduling software to monitor and schedule the vacuum transmission control system;

[0024] an Ethernet switch, used to mount the Ethernet equipment in the vacuum transmission control system;

[0025] The lower embedded control module is used for centralized control of each component of the transmission control system, and has an Ethernet interface and a DeviceNET interface; the lower embedded control module performs data transmission with the upper scheduling control module through the Ethernet switch;

[0026] The DeviceNET hub is used to mount the DeviceNET equipment in the vacuum transmission control system, and is connected with the lower embedded control module.

[0027] It should be noted that the upper-level scheduling control module communicates with the lower-level embedded control module through the Ethernet s...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a vacuum transmission control system comprising an upper scheduling control module, an Ethernet switch, a lower embedded control module and a DeviceNET concentrator. The upper scheduling control module is used for operating upper scheduling software and performing monitoring scheduling on the vacuum transmission control system; the Ethernet switch is used for mounting Ethernet equipment in the vacuum transmission control system; the lower embedded control module is used for centralized control of all components of the transmission control system and provided with an Ethernet interface and a DeviceNet interface; the lower embedded control module performs data transmission with the upper scheduling control module through the Ethernet switch; the DeviceNET concentrator is used for mounting DeviceNET equipment in the vacuum transmission control system and connected with the lower embedded control module. The vacuum transmission control system is not only convenient for equipment maintenance but also less in space occupation.

Description

technical field [0001] The invention relates to the field of control, in particular to a vacuum transmission control system. Background technique [0002] Semiconductor processing equipment usually includes a vacuum transmission control system, which mainly includes two parts: Equipment Front End Module (EFEM) and Vacuum Back End. The vacuum transfer control system mainly completes the transfer control and scheduling from the atmospheric environment to the vacuum environment to the process equipment in the wafer processing process. [0003] Existing vacuum transfer control systems usually have different system components with different processing processes, and each component has its own controller and communication protocol. Therefore, the control structure of the upper and lower computers is mainly used, the centralized control of each component controller is completed by the lower computer, and the centralized scheduling of the entire system is completed by the upper com...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCY02P90/02G05B19/4188
Inventor 褚明杰徐方曲道奎李学威邹风山杨奇峰
Owner SHENYANG SIASUN ROBOT & AUTOMATION