Macro and micro two-stage driving precision positioning mechanism

Abstract

The invention relates to a macro and micro two-stage driving precision positioning mechanism, belongs to the technical field of precision positioning and solves the technical problems of big manufacturing and mounting difficulty, complicated structure and high manufacturing cost of a two-stage guide rail in the prior art. The macro and micro two-stage driving precision positioning mechanism comprises a piezoelectric actuator, a vibration absorption system, a base, an air flotation guide rail, a macro-moving positioning system, a micro-moving positioning slide block, a support frame and a laser interference measurement instrument, wherein the base is fixedly connected with the upper end surface of the vibration absorption system through a screw; the air flotation guide rail is connected with one end of the base through a screw; the support frame is connected onto the other end of the base through a screw; the laser interference measurement instrument is connected with the support frame through a screw; the micro-moving positioning slide block is in clearance fit with the air flotation guide rail; a rotor of a linear motor is fixedly connected with a macro-moving positioning and clamping slide block; a stator of the linear motor is connected with the base through a screw; two clamping guide rails are connected with the base through screws; one end of the piezoelectric actuator is fixedly connected with the micro-moving positioning slide block, and the other end of the piezoelectric actuator is fixedly connected with the macro-moving positioning and clamping slide block.

Description

technical field [0001] The invention belongs to the technical field of precision positioning, and in particular relates to a macro-micro two-stage drive precision positioning mechanism. Background technique [0002] With the rapid development of chip lithography and packaging in IC manufacturing, device packaging and assembly in MESM manufacturing, and precision machining and precision measurement in precision engineering, higher and higher requirements are placed on the travel and accuracy of positioning systems. , The macro-micro two-stage drive precision positioning mechanism solves the contradiction between large stroke and high precision in precision positioning technology, and the macro-micro two-stage drive positioning mechanism is increasingly used in engineering applications. [0003] At present, the devices used as micro-displacement drives in the macro-micro two-stage drive positioning technology mainly include piezoelectric drives, voice coil motors, magnetostric...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a macro-micro two-stage drive precision positioning mechanism to solve the technical problems of the prior art that the linear motion has no guide rail guidance, the two-stage guide rail is difficult to manufacture and install, the structure is complicated and the manufacturing cost is high.

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