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Resonator element, resonator, oscillator, electronic device, and mobile object

A vibrating piece and oscillator technology, which is applied in the fields of vibrating piece, vibrator, electronic equipment, moving body and oscillator, can solve the problems of complicated manufacturing process, decreased product reliability, tilt and so on.

Inactive Publication Date: 2015-05-27
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the vibrating element having such a mass relationship has the following problems: the balance when it is mounted on the package is poor, and when it is mounted, it tends to be in a state of inclination with respect to the mounting surface of the package.
This problem leads to a decrease in yield during manufacturing, a complication of the manufacturing process, and a decrease in product reliability.

Method used

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  • Resonator element, resonator, oscillator, electronic device, and mobile object
  • Resonator element, resonator, oscillator, electronic device, and mobile object
  • Resonator element, resonator, oscillator, electronic device, and mobile object

Examples

Experimental program
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Effect test

no. 1 Embodiment approach ＞

[0052] figure 1 It is a plan view showing the vibrating piece according to the first embodiment of the present invention, figure 2 yes figure 1 The A-A line sectional view in. also, image 3 It is a plan view explaining the principle of vibration leakage suppression.

[0053] In addition, in each figure, for convenience of description, the X-axis, the Y-axis, and the Z-axis are illustrated as three axes perpendicular to each other. In addition, in the following description, the direction parallel to the X-axis (second direction) is referred to as the "X-axis direction", the direction parallel to the Y-axis (first direction) is referred to as the "Y-axis direction", and The direction (third direction) parallel to the Z-axis is referred to as the "Z-axis direction", and the end sides of the arrows of the X-axis, Y-axis, and Z-axis shown in each figure are referred to as "+ (positive)", and The base end side is referred to as "- (minus)". In addition, in the following desc...

no. 2 Embodiment approach ＞

[0118] Next, a second embodiment of the present invention will be described.

[0119] Figure 7 It is a plan view showing the vibrating piece according to the second embodiment of the present invention.

[0120] Hereinafter, regarding the second embodiment, differences from the above-described embodiment will be mainly described, and descriptions of the same matters will be omitted.

[0121] The second embodiment is substantially the same as the first embodiment except that the structure (shape) of the narrowed portion of the base is different. exist Figure 7 In , the same reference numerals are assigned to the same structures as those in the above-mentioned embodiment.

[0122] Figure 7 The base portion 220A included in the vibrating piece 200A shown has a reduced width portion 222A. The outline of the reduced-width portion 222A is constituted by linear inclined portions 222 b and 222 c inclined with respect to two axes, the X axis and the Y axis, in plan view. One en...

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Abstract

A resonator element includes a base section, a pair of vibrating arms extending from the base section, and a holding arm extending from the base section between the pair of vibrating arms. The vibrating arms include arm sections extending from the base section and hammerheads provided at the distal end sections of the arm sections. When the mass of the vibrating arms is represented as M1 and the mass of the holding arm is represented as M2, a relation of M1>M2 is satisfied.

Description

technical field [0001] The present invention relates to a vibrating piece, a vibrator, an oscillator, electronic equipment, and a moving body. Background technique [0002] As a vibration device such as a quartz oscillator, a device having a tuning-fork type vibration piece is known (for example, refer to Patent Document 1). [0003] For example, the resonator described in Patent Document 1 includes a tuning-fork-shaped portion having two arms joined by a base. On this base, a central arm arranged in parallel to the arms is attached between the two arms. In this resonator, for the purpose of achieving good decoupling (reduced vibration leakage), the mass of the central arm is greater than the mass of the arms of the tuning fork-shaped part. [0004] However, the vibrating element having such a mass relationship has a problem that it is not well balanced when mounted on a package, and tends to be inclined relative to the mounting surface of the package when mounted. This p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/19H03H9/02
CPCH03H9/215
Inventor 山田明法
Owner SEIKO EPSON CORP
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