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Device and method for checking mass flow controller

A flow controller and mass flow technology, applied in the field of microelectronics, can solve the problems of time-consuming and laborious, unable to accurately reflect the performance of the calibrated mass flow controller, frequent manual disassembly and assembly, etc., to achieve the effect of improving efficiency

Active Publication Date: 2015-06-03
WUXI CHINA RESOURCES HUAJING MICROELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Frequent manual disassembly and assembly is time-consuming and laborious, and it is difficult to complete long-term repetitive detection, which cannot accurately reflect the performance of the calibrated mass flow controller

Method used

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  • Device and method for checking mass flow controller
  • Device and method for checking mass flow controller
  • Device and method for checking mass flow controller

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] Embodiment 1 of the present invention discloses a device for calibrating a mass flow controller, such as figure 1 As shown, it includes: a standard mass flow controller group 1, a calibrated mass flow controller 2, a first sensor 3, a second sensor 4, a processor (not shown in the figure) and a pneumatic valve group.

[0057] Wherein, the standard mass flow controller group 1 includes at least two standard mass flow controllers 11, and each standard mass flow controller 11 has a different range;

[0058] It should be noted that the ranges of the standard mass flow controllers 11 in the standard mass flow controller group 1 are different, including but not limited to 100sccm, 200sccm, 500sccm, 2slm, 10slm, 20slm, 50slm, etc.

[0059] The first sensor 3 is connected with the standard mass flow controller group 1 and is used to read the first parameter of the gas flowing through the standard mass flow controller 11 .

[0060] It should be noted that the first parameter ma...

Embodiment 2

[0078] Embodiment 2 of the present invention discloses a device for calibrating mass flow controllers, such as Figure 4 As shown, it includes: a standard mass flow controller group 1, a calibrated mass flow controller 2, a first sensor 3, a second sensor 4, a processor and a pneumatic valve group.

[0079] a set of standard mass flow controllers 1 comprising at least two standard mass flow controllers 11;

[0080] Calibrated mass flow controller 2;

[0081] The first sensor 3 connected to the standard mass flow controller group 1 to read the first parameter of the gas flowing through the standard mass flow controller 11;

[0082] A second sensor 4 connected to the calibrated mass flow controller 2 to read the second parameter of the gas flowing through the calibrated mass flow controller 2;

[0083] A processor that selects a standard mass flow controller 11 according to the range of the calibrated mass flow controller 2, and receives the first parameter and the second para...

Embodiment 3

[0095] Embodiment 3 of the present invention discloses a method for calibrating mass flow controllers using the device for calibrating mass flow controllers disclosed in Embodiment 2, such as Figure 5 shown, including:

[0096] In step S501, the processor receives an input gas type instruction, and selects a standard mass flow controller from the standard mass flow controller group according to the gas type instruction.

[0097] In step S501 of the present invention, a device for verifying mass flow controllers such as Figure 4As shown, in the process of calibrating the mass flow controller, the processor receives the input gas type instruction, selects the standard mass flow controller 11 in the standard mass flow controller group 1 according to the gas type instruction, and opens the first pneumatic valve The first pneumatic valve 51 and the second pneumatic valve 52 corresponding to the selected standard mass flow controller 11 in the group. The detection gas flows thro...

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Abstract

The invention discloses a device and a method for checking a mass flow controller. The device comprises a standard mass flow controller group, the to-be-calibrated mass flow controller, a first sensor, a second sensor, a processor and a pneumatic valve group, wherein the standard mass flow controller group comprises at least two standard mass flow controllers; the first sensor reads first parameters that gas flows through the standard mass flow controllers, and the second sensor reads second parameters that the gas flows through the to-be-calibrated mass flow controller; the processor selects the standard mass flow controllers and judges whether the to-be-calibrated mass flow controller is qualified or not; the pneumatic valve group comprises a first pneumatic valve, a second pneumatic valve and a third pneumatic valve. By virtue of the device and the method which are disclosed by the invention, the corresponding standard mass flow controller can be automatically selected according to the measurement range of the to-be-calibrated mass flow controller, frequent disassembly and assembly of the standard mass flow controllers are not needed any more, and the mass flow controller calibration efficiency is improved.

Description

technical field [0001] The invention relates to the field of microelectronic technology, in particular to a device and method for calibrating a mass flow controller. Background technique [0002] Mass flow controller (MASS FLOW CONTROLLER, MFC) is widely used in the precise control of various process gas flow, and has the advantages of fast response speed and high control precision. After a period of use, the mass flow sensor may have zero point drift. Once the zero point drift occurs, it will cause fluctuations in product process quality. Therefore, regular calibration of mass flow controllers is required. Moreover, the mass flow controller is used in corrosive, toxic, flammable and explosive occasions. After a long period of use, the mass flow controller will age and leak, resulting in serious safety accidents. Therefore, it is also necessary to regularly perform leak detection on the mass flow controller . [0003] In the prior art, a standard mass flow controller with...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B23/02
CPCG05B23/0213
Inventor 吴啸胡锡峰毛伟晨
Owner WUXI CHINA RESOURCES HUAJING MICROELECTRONICS