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Chemical liquid distribution system and flow control method thereof

A technology of chemical solution and distribution system, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of high price and narrow flow control range, and achieve the effect of low price, simple function and cost reduction.

Active Publication Date: 2017-08-22
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, since the flow controller is a mature commercially available product with a specific flow control range, and the flow control range is often narrow, it cannot well meet the requirements of the process for the flow range, and the price is relatively expensive

Method used

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  • Chemical liquid distribution system and flow control method thereof
  • Chemical liquid distribution system and flow control method thereof
  • Chemical liquid distribution system and flow control method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Please refer to figure 2 , The chemical liquid distribution system of the first embodiment of the present invention includes a liquid storage tank 10 , a chemical liquid circulation pipeline, a chemical liquid output pipeline and a controller 15 . The liquid storage tank 10 stores chemical liquid inside, and a liquid return inlet is arranged at the top, and a liquid outlet is arranged at the bottom. One end of the chemical liquid circulation pipeline is connected with the liquid return inlet, and the other end is connected with the liquid outlet. The circulating pump 11 is arranged on the chemical liquid circulation pipeline, and its input end is connected with the liquid outlet for driving the flow of the chemical liquid. In this embodiment, the circulation pump can be a magnetic pump. A circulation pump 11 , a heater 16 , a filter 17 , a pressure sensor 18 and a throttle valve 19 are sequentially arranged on the chemical liquid circulation pipeline from the liquid ...

Embodiment 2

[0032] image 3 Shown is a schematic diagram of a chemical liquid dispensing system according to a second embodiment of the present invention.

[0033] The chemical liquid distribution system includes a liquid storage tank 20 , a circulation main line, a circulation branch line and a controller 25 . The liquid storage tank 20 stores chemical liquid inside, and a liquid return inlet is arranged at the top, and a liquid outlet is arranged at the bottom. One end of the circulation main line is connected with the liquid return inlet, and the other end is connected with the liquid outlet. The circulation pump 21 is arranged on the circulation main line, and its input end is connected with the liquid outlet, and is used to drive the flow of the chemical liquid. In this embodiment, the circulation pump can be a magnetic pump. A circulation pump 21 , a heater 26 , a filter 27 , a pressure sensor 28 and a first throttle valve 29 are provided in sequence on the circulation main line ...

no. 1 example

[0038] Compared with the first embodiment, this embodiment increases the design of the circulation branch pipeline. After the chemical liquid in the liquid storage tank 20 is pressurized by the circulation pump 21, it passes through the heater 26, the filter 27 and the pressure sensor 28, and then Divide into two paths and get back to the liquid outlet pipe 20. The pipeline resistance at the two output ends of the three-way valve 23 is balanced by the second throttle valve 30 of the circulation branch pipeline. After the three-way valve 23 is switched to the process unit 23, the pipeline pressure in the circulation branch pipeline remains stable. The detection value of the flow meter that reaches the set flow rate will no longer fluctuate. On the other hand, the chemical liquid in the circulation branch line is heated to the required process temperature by the heater 26 during the circulation process. After the three-way valve 23 is switched to the process unit 23, the heat lo...

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PUM

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Abstract

A chemical liquid dispensing system comprises: a liquid storage tank (10) having a return liquid inlet and a liquid outlet; chemical liquid circulation lines having one end connected to the return liquid inlet and the other end connected to the liquid outlet and provided with a circulation pump (11) thereon; chemical liquid output lines having one end connected to the chemical liquid circulation lines and the other end connected to a process unit (14) and provided with a flow volume meter (12) and a valve element (13) thereon, wherein the flow volume meter (12) is used to detect chemical liquid flow volume outputted by the process unit (14); a controller (15) used to control rotating speed of the circulation pump (11). When chemical liquid needs to be delivered to the process unit (14), and before the valve element (13) is switched to enable a transmission path between the flow volume meter (12) and the process unit (14) to be in communication, the controller (15) controls the rotating speed of the circulation pump (11) according to current chemical liquid flow volume detected by the flow volume meter (12). The chemical liquid dispensing system can adjust process flow volume required by the process unit (14) to within a wide range.

Description

technical field [0001] The invention relates to semiconductor washing machine equipment, in particular to a chemical liquid distribution system and a flow control method for the washing machine equipment. Background technique [0002] The chemical liquid distribution system is one of the key systems in the development of single wafer cleaning equipment. It provides the entire equipment online with a certain temperature, pressure, and flow rate of chemical liquid that meets the process requirements, thereby ensuring the uniformity and consistency of the wafer surface corrosion. figure 1 Shown is a schematic diagram of a chemical liquid distribution system in the prior art, as shown in the figure, the system includes a liquid storage tank 1, the liquid storage tank 1 can store a certain amount of chemical liquid and has a liquid return inlet and a liquid outlet Circulation pipeline, one end of the circulation pipeline is connected to the liquid return inlet of the liquid stora...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67
Inventor 何金群王锐廷张豹
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD