Optical waveguide, optical waveguide manufacturing method, and optical module
A manufacturing method and optical waveguide technology, which is applied in the field of optical waveguides, can solve the problems of different processability between substrates and optical waveguides, peeling, end face inclination, etc.
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no. 1 Embodiment approach
[0059] The optical waveguide of the first embodiment of the present invention is, for example, figure 1 As shown, there are a substrate 1, a lower cladding layer 2 (lower cladding pattern 21) provided on the optical waveguide forming surface 13 of the substrate 1, a core pattern 31 for optical signal transmission provided on the lower cladding layer 2, and according to The upper cladding layer 4 (upper cladding pattern 41 ) provided so as to cover the optical signal transmission core pattern 31 together with the lower cladding layer 2 has an outer peripheral wall at a position protruding from the substrate outer periphery 11 of the substrate 1 . 33 of the protruding patterns 32 .
[0060] [substrate]
[0061] The substrate 1 imparts toughness to the optical waveguide. In addition, in the case where the optical path conversion mirror is formed on the optical waveguide using a dicing saw or the like, the substrate 1 can suppress breakage of the optical waveguide. In addition,...
no. 2 Embodiment approach
[0123] The optical waveguide of the second embodiment of the present invention is, for example, image 3 As shown, compared with the optical waveguide shown in the first embodiment, the difference is that the bottom surface of the protruding pattern 32 as the protruding portion 5 is formed closer to the optical waveguide than the back surface of the optical waveguide formation surface 13 of the substrate 1 . side of face 13. Regarding the optical waveguide of the second embodiment, descriptions of substantially the same parts as those of the optical waveguide of the first embodiment are omitted because they are redundant descriptions.
[0124] Next, use Figure 4 A method of manufacturing an optical waveguide according to a second embodiment of the present invention will be described.
[0125] [Process A2]
[0126] The method of forming the substrate 1 on a part of the supporting substrate 6 and forming the peeling substrate 7 in the vicinity of the substrate 1 in step A2 i...
no. 3 Embodiment approach
[0154] The optical waveguide of the third embodiment of the present invention is, for example, Figure 5As shown, the difference from the optical waveguide shown in the first embodiment is that the protruding portion 5 is a protruding pattern 32 and an upper cladding pattern 41 . Regarding the optical waveguide of the third embodiment, descriptions of substantially the same parts as those of the optical waveguide of the first embodiment are omitted because they are redundant descriptions.
[0155] Next, use Image 6 A method of manufacturing an optical waveguide according to a third embodiment of the present invention will be described.
[0156] [Process A1 and Process B1]
[0157] The step of forming the substrate 1 on a part of the support substrate 6 in step A1 and the step of forming the lower cladding pattern 21 on the optical waveguide formation surface 13 of the substrate 1 in step B1 are performed simultaneously.
[0158] First, if Image 6 As shown in (a), the sub...
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