Detection device and detection method of dust concentration

A dust concentration detection and detection device technology, applied in the field of micro-mechanical systems, can solve the problems of no design sensitivity, etc., and achieve the effect of easy installation and portability, convenient dust detection sensor network, and convenient mass production

Active Publication Date: 2015-08-05
SOUTHEAST UNIV
View PDF5 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Also, in most cases they are not...

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Detection device and detection method of dust concentration
  • Detection device and detection method of dust concentration
  • Detection device and detection method of dust concentration

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0030] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0031] Such as Figure 1 to Figure 3 As shown, a dust concentration detection device of the present invention includes a deposition resistor 1 , a cantilever beam 2 , a glass substrate 3 , a tapered electrode 4 and a silicon substrate 7 . The end surface of the cantilever beam 2 is fixedly connected to the end surface of the silicon substrate 7 , the deposition resistor 1 is located on the top of the contact portion between the cantilever beam 2 and the silicon substrate 7 , and the deposition resistor 1 is connected to the cantilever beam 2 and the silicon substrate 7 . Both ends of the deposition resistor 1 are led out by metal wires 5 . The conical electrode 4 is fixedly connected to the upper surface of the silicon substrate 7 , and the surface of the conical electrode 4 is provided with a titanium-copper alloy layer 6 . The glass subs...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Login to view more

Abstract

The invention discloses a detection device of dust concentration, which includes: a deposition resistor, a cantilever beam, a glass substrate, a tapered electrode and a silicon substrate. An end surface of the cantilever beam is connected fixedly to the end surface of the silicon substrate. The deposition resistor is arranged on the top of a contact position of the cantilever beam and the silicon substrate and is used for connecting the cantilever beam to the silicon substrate. The two ends of the deposition resistor are led out by metal wires. The tapered electrode is fixedly connected to the upper surface of the silicon substrate. A Ti/Cu alloy layer is arranged on the surface of the tapered electrode. The glass substrate is arranged over the tapered electrode and is provided with through holes. The surface of the glass substrate is coated by nickel. The invention also discloses a detection method of dust concentration. The device and the method can avoid the problem of large size and slow response of a conventional device. The device is portable and is quick in response.

Description

technical field [0001] The invention belongs to the technical field of micromechanical systems, and in particular relates to a dust concentration detection device and a detection method. Background technique [0002] Dust is a substance composed of fine particles in the atmosphere derived from soil, weathering, volcanic eruptions and pollution. Dust in homes, offices, and other human habitats contains plant seeds, hair, fabric and paper fibers, outdoor minerals, soil, human skin cells, and more. [0003] The dust concentration in the air is an important index to measure the air quality. The suspended particles (also called "dust") in the air are extremely harmful to human health, especially the small particles. The environmental protection department refers to the particles with an aerodynamic equivalent diameter of ≤10 μm as inhalable particles, and the particles with an aerodynamic equivalent diameter of ≤7.07 μm as respirable particles. [0004] The commonly used detect...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N15/06
Inventor 陈洁惠肇宇
Owner SOUTHEAST UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap