A sputtering fixture and a sputtering operation platform
A technology of operating platform and operating platform, which is applied in the direction of manufacturing tools, workpiece clamping devices, optics, etc., can solve the problems of high sputtering fixture power and coating film falling off, so as to reduce production difficulty, prevent coating film falling off, and prevent downward extended effect
Active Publication Date: 2018-06-22
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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- Application Information
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Problems solved by technology
[0004] The purpose of the present invention is to provide a sputtering fixture and a sputtering operation platform to solve the technical problem that the existing sputtering fixture is easy to cause the coating to fall off due to long-term maintenance or too much power
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[0036] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the present invention can be practiced. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "side", etc., are for reference only The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention.
[0037] In the figures, structurally similar units are denoted by the same reference numerals.
[0038] Please refer to figure 1 , figure 1 It is a top view of the sputtering fixture of the present invention;
[0039] Sputtering fixture of the present invention such as figure 1 and 2 As shown, it is used to fix the substrate to perform coating operation on the substrate. The sputtering fixture includes: an operation base 10, a plurality of fixture b...
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The invention provides a sputtering clamp and a sputtering operating platform. The sputtering clamp is used for fixing a substrate so that the coating operation can be performed on the substrate; the sputtering clamp comprises an operating abutment and a plurality of clamp bodies; each clamp body comprises a fixed part fixed on the operating abutment, a rotating shaft for connecting the fixed part and a movable part, the movable part capable of moving relatively to the fixed part by virtue of the rotation of the rotating shaft to drive a clamping part to move, and the clamping part arranged on the movable part; the clamping part comprises a supporting portion and a cambered jaw portion, the two of which are connected with each other; a plurality of convex structures for preventing a coated film from falling are arranged on the upper surface of the cambered jaw portion. According to the sputtering clamp and the sputtering operating platform, the plurality of convex structures are arranged on the upper surface of the cambered jaw portion to solve the technical problem of easy coated film stripping in case of relatively long maintenance period or relatively high power.
Description
technical field [0001] The invention relates to the field of displays, in particular to a sputtering fixture and a sputtering operation platform. Background technique [0002] In the manufacturing process of liquid crystal display panels, sputtering fixtures are often used to fix the glass substrate so that process operations can be performed on the glass substrate, such as vacuum coating. Vacuum coating can be used to make the first metal layer, and pure aluminum is often used to make the first metal layer. Improvements in the materials used in vacuum coating have resulted in longer maintenance intervals for sputter fixtures. When the maintenance cycle is long, the sputtering fixture is likely to cause the coating to fall off, especially when the power of the sputtering fixture reaches 15,000-30,000k / hr, this situation is more likely to occur; and due to the long-term coating, the coating area gradually goes down from the sputtering fixture Expand, and eventually flow into...
Claims
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IPC IPC(8): G02F1/13B25B11/00
CPCB25B11/00G02F1/1303
Inventor 王子彦
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD