MEMS (micro-electro-mechanical system) three-axis gyroscope
A gyroscope and Z-axis technology, applied in the field of inertial measurement, can solve problems such as the complex structure of MEMS gyroscopes, and achieve the effect of improving utilization and accuracy
Active Publication Date: 2015-09-09
WEIFANG GOERTEK MICROELECTRONICS CO LTD
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Problems solved by technology
Therefore, the structure of the MEMS gyroscope is relatively complicated. Generally speaking, it is very difficult to integrate an XYZ three-axis gyroscope on a single structure.
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[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
[0028] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.
[0029] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the description.
[0030] In all examples shown and discussed herein, any specific values should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodiment may have dif...
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The invention discloses an MEMS (micro-electro-mechanical system) three-axis gyroscope. The sidewall of a follow-up weight is connected with a main weight through a driving elastic beam; the follow-up weight is provided with X-axial and Y-axial detection weights; the X-axial detection weight is located in the Y-axial direction of the follow-up weight and is connected with the follow-up weight through a first connecting beam provided in the Y-axial direction; the Y-axial detection weight is located in the X-axial direction of the follow-up weight and is connected with the follow-up weight through a second connecting beam provided in the X-axial direction; a Z-axial decoupling weight connected with the main weight through a third connecting beam is further provided; a Z-axial detection weight is connected with the Z-axial decoupling weight through a fourth connecting beam; the Z-axial detection weight is connected to an anchor point of a substrate through a fifth connecting beam. The MEMS three-axis gyroscope in the structural design has the advantages that detection can be integrated to a single chip, availability of the chip is improved, and angular velocity signal detection is more precise.
Description
technical field [0001] The invention relates to the field of inertial measurement, and more specifically, to a three-axis gyroscope manufactured based on a micro-electromechanical system. Background technique [0002] MEMS gyroscope is an inertial device based on micro-electromechanical technology, which is used to measure the angular velocity of object motion. It has the characteristics of small size, high reliability, low cost, and suitable for mass production, so it has broad market prospects and can be applied to a wide range of fields including consumer electronics, aerospace, automobiles, medical equipment, and weapons. [0003] The MEMS gyro system usually includes a driving part and a detecting part, which uses the principle of Coriolis force (hereinafter referred to as Coriolis force) to detect the angular velocity, and the Coriolis force is an artificially constructed virtual force. Specifically, it needs to be When the structure is driven in one direction, when t...
Claims
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Login to View More IPC IPC(8): G01C19/5712
CPCG01C19/5712
Inventor 郑国光
Owner WEIFANG GOERTEK MICROELECTRONICS CO LTD