A detection method for a porous silicon photonic crystal biochip
A detection method and photonic crystal technology, applied in the field of biosensors, can solve difficult problems such as high-throughput and rapid biological detection
Active Publication Date: 2018-12-11
XINJIANG UNIVERSITY
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Problems solved by technology
This type of array is difficult to apply to high-throughput and rapid biological detection because it needs to analyze the change of the refractive index of each unit one by one through a spectrometer.
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[0032] In order to clearly understand the technical solution of the present invention, its detailed structure will be presented in the following description. Obviously, the implementation of the embodiments of the invention is not limited to specific details familiar to those skilled in the art. The preferred embodiments of the present invention are described in detail below, and there may be other implementations besides those described in detail.
[0033] The invention provides a kind of detection method of porous silicon photonic crystal biochip, described detection method comprises the following steps:
[0034] S1, combine figure 1 , figure 1 It is a scanning electron microscope picture of the surface of the microarray of the present invention. Si was deposited by plasma-enhanced chemical vapor deposition (PECVD) 3 N 4 Deposited on P-type single crystal silicon with a crystal orientation of , a resistivity of 0.03Ω·cm, and a thickness of 400μm, Si 3 N 4 The thicknes...
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Abstract
The invention discloses a detection method of a porous silicon photonic crystal biochip. The detection method comprises the following steps: 1, depositing Si3N4 on P-type monocrystalline silicon through a plasma enhanced chemical vapor deposition technology, and preparing a 8*8 micro-array device by using a standard photoetching technology; 2, electrochemically corroding the micro-array device in dark and normal temperature environment, wherein each of circular units in the micro-array device is a porous silicon micro-cavity; 3, connecting the porous micro-cavities to the detection optical path of the optical characteristics of the surface of the micro-array device; and 4, measuring the reflectivity of the surface of the micro-array device by using the detection optical path, converting the change of the reflectivity into the brightness change of a corresponding area in a digital image, analyzing the gray scale grade of the digital image corresponding to the brightness change of the corresponding area, and detecting the refractive index with high sensitivity.
Description
technical field [0001] The invention relates to the field of biosensors, in particular to a detection method for a porous silicon photonic crystal biochip. Background technique [0002] Biosensor is a special type of sensor, which is composed of biomolecular recognition elements and various physical and chemical transducers, and is used for the analysis and detection of various living substances and chemical substances. Biosensors integrate biology, chemistry, physics, information science and related technologies, and have developed into a very active research field. [0003] Porous silicon has been widely used in experimental research and application as a substrate material for biological detection. Various porous silicon multilayer structures can be prepared by alternately using different currents during electrochemical corrosion of porous silicon. Electrochemical etching technology combined with photolithography and other technologies can also prepare various structures ...
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IPC IPC(8): G01N21/41
Inventor 贾振红吕小毅
Owner XINJIANG UNIVERSITY