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Inspection device and abnormality detection method

An inspection device and anomaly detection technology, applied in measurement devices, vibration measurement, vibration measurement in solids, etc., can solve the problems of inability to detect vibration and transmission of vibration detection parts, and achieve the effect of improving detection sensitivity

Active Publication Date: 2019-09-20
KK TOSHIBA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] On the other hand, if the vibration detection unit fails, even if the product vibrates abnormally, the vibration detection unit cannot detect the vibration.
Or, in the case of a fault such as a disconnection in the transmission wiring, the detection result of the vibration detection unit cannot be transmitted to the determination unit.

Method used

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  • Inspection device and abnormality detection method
  • Inspection device and abnormality detection method
  • Inspection device and abnormality detection method

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Embodiment Construction

[0020] Hereinafter, several embodiments will be described with reference to the drawings. In the drawings, the same symbols indicate the same or similar parts.

[0021] refer to Figures 1 to 7 The inspection device and abnormality detection method of the first embodiment will be described.

[0022] figure 1 It is a perspective view showing the inspection apparatus 10 of this embodiment. As an example, the abnormality detection method of this embodiment is a method of detecting abnormality of the inspection device 10 . The inspection device 10 is configured to be able to detect vibration generated by the product when the product 5 operates as an example of the object to be inspected, and to determine whether the product is abnormal based on the detection result.

[0023] Such as figure 1 As shown, the inspection device 10 has: a vibration measuring device (setting part) 20 formed for setting the product 5 and capable of measuring the vibration of the product 5 in action; ...

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Abstract

In general, according to one embodiment, an inspection apparatus includes a disposition; a vibration detector configured to output a signal corresponding to vibration of the inspection object; a determination module configured to determine presence / absence of abnormality of the inspection object and configured to Fourier-transform an output result of the vibration detector at a time when the inspection object is disposed on the disposition section, to create vibration information indicative of vibration power of a characteristic frequency of each of structural elements of the disposition section, and to determine presence / absence of abnormality of the inspection apparatus, based on the vibration information; and a transmission module configured to transmit an output signal of the vibration detector to the determination module.

Description

[0001] CITATION OF RELATED APPLICATIONS: This application is based upon and claims the benefit of priority from prior Japanese Patent Application No. 2014-056319 filed on Mar. 19, 2014, the entire contents of which are hereby incorporated by reference. technical field [0002] Embodiments described here relate to an inspection device for inspecting an object to be inspected, and an abnormality detection method for detecting an abnormality of the inspection device for inspecting an object to be inspected. Background technique [0003] For example, in an inspection process in a manufacturing process, etc., quality inspection is performed using various sensors. As an example, in a vibration detection device, an acceleration sensor or the like is used, and a quality inspection is performed based on the detected vibration. [0004] This inspection device has: the vibration detection part that detects the vibration that product produces such as acceleration sensor; Pass-through r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H17/00
CPCG01H1/00G01M7/00
Inventor 曾根聪史
Owner KK TOSHIBA