Optical resistor stripping composition and stripping method, panel, panel display and manufacture
A composition and photoresist technology, applied in optics, instruments, optical mechanical equipment, etc., can solve the problem that copper wiring does not have corrosion inhibition effect, and achieve the effect of corrosion minimization
Active Publication Date: 2015-09-23
DONGWOO FINE CHEM CO LTD
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[0087]Example 1 to Example 14, and Comparative Example 1 to Comparative Example 5: Preparation of Photoresist Stripping Composition
[0088] A photoresist stripping composition was prepared by mixing the components given in Table 1 below.
[0089] [Table 1]
[0090] (unit: wt%)
[0091]
[0092] NMP: N-Methylpyrrolidone
[0093] NMF: N-Methylformamide
[0094] BDG: Diethylene glycol monobutyl ether
[0095] EDG: Diethylene glycol monoethyl ether
[0096] MDEA: N-Methyldiethanolamine
[0097] AEE: 2-(2-iminoethoxy)-1-ethanol
[0098] MEA: Monoethanolamine
[0099] HEM: N-Hydroxyethylmorpholine
[0100] BTA: Benzotriazole
[0101] MG: methyl gallate
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The invention discloses an optical resistor stripping composition containing oxazolidine-5-methylamine or hexahydropyriminine-5-alcohol, a method employing the optical resistor stripping composition for stripping optical resistor, a panel used for display and manufacture method of the plane, and the panel display and the manufacture of the panel display.
Description
[0001] Cross References to Related Applications [0002] This application claims the benefit of Korean Patent Application No. KR 10-2014-0033222 filed on March 21, 2014 and Korean Patent Application No. KR 10-2014-0033223 filed on March 21, 2014, both patent applications Incorporated herein by reference in its entirety. technical field [0003] The present invention relates to a photoresist stripping composition and a method for stripping a photoresist using the photoresist stripping composition, a flat panel for a display and a manufacturing method thereof, and a flat panel display and a manufacturing method thereof. Background technique [0004] Recently, as the demand for realizing high-resolution flat panel displays has increased, efforts have been made to increase the number of pixels per unit area. According to such a trend, there is a need to reduce the width of wiring, and in response to this demand, a dry etching process has been introduced, and process conditions ...
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Inventor 高京俊金正铉李喻珍金圣植
Owner DONGWOO FINE CHEM CO LTD