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MEMS thermal type wind speed sensor having on-chip self calibration function

A wind speed sensor, self-calibration technology, applied in the direction of instrumentation, speed/acceleration/shock measurement, speed/acceleration/shock measurement equipment testing/calibration, etc., can solve the problem of increasing the test cost of MEMS thermal wind speed sensor and limiting MEMS thermal wind speed sensor Problems such as application range and long duration can achieve the effect of reducing the cost of batch testing without affecting the measurement accuracy and short duration

Active Publication Date: 2015-10-21
SOUTHEAST UNIV
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Problems solved by technology

However, under the current circumstances, the calibration of MEMS thermal wind speed sensors needs to be carried out in an environment-controlled wind tunnel. Record the signal output value of the sensor, the efficiency is relatively low
The shortcomings in the calibration process of these sensors increase the testing cost of the MEMS thermal anemometer and severely limit the application range of the MEMS thermal anemometer

Method used

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  • MEMS thermal type wind speed sensor having on-chip self calibration function

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Embodiment Construction

[0012] The present invention will be further described below in conjunction with the accompanying drawings.

[0013] Such as figure 1 Shown is a MEMS thermal wind velocity sensor with an on-chip self-calibration function, including a sensor chip substrate 1 and a packaging material 2. The sensor chip substrate 1 is attached to the center of the lower surface of the packaging material 2 through a thermally conductive adhesive layer 9. A temperature generating element 3 is arranged at the center of the lower surface of the sensor chip substrate 1, and a first temperature measuring sensor 41 and a second temperature measuring sensor 42 are also arranged on the lower surface of the sensor chip substrate 1. The first temperature measuring sensor 41 and the second temperature measuring sensor The second temperature measuring sensor 42 is symmetrically distributed with respect to the temperature generating element 3; the upper surface of the packaging material 2 is provided with a fi...

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Abstract

The invention discloses an MEMS thermal type wind speed sensor having an on-chip self calibration function. A thermal temperature difference signal provided by a heating element on a sensor encapsulation surface replaces a temperature difference signal generated by a wind tunnel, so the problem that sensor measurement and calibration must be performed in wind tunnel environment is prevented. The sensor has the advantages of simple structure encapsulation, very low testing cost and convenient maintenance, and can perform calibration detection on site.

Description

technical field [0001] The invention relates to a MEMS thermal wind speed sensor with on-chip self-calibration function. Background technique [0002] Accurate measurement of wind speed plays a very important role in many aspects of social production and life, such as agricultural production, transportation, equipment manufacturing, wind power generation and weather forecasting. For example, in agricultural production, the wind speed has a great influence on the sowing of plants, the pollination of stamens, and the spraying of pesticides; in transportation, the monitoring of wind speed is of great significance to the safe operation of aircraft, high-speed rail and other transportation vehicles . However, because the unevenness of wind speed is very common, there may be a large difference in wind speed between two places in the same area hundreds of meters apart. In order to detect wind speed more accurately, the construction of large-scale sensor network nodes and the deve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P21/02
Inventor 秦明朱雁青叶一舟黄庆安
Owner SOUTHEAST UNIV
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