Liquid wax for dice bonding in GaAs MMIC thinning technology
A liquid wax and process technology, applied in the direction of wax adhesives, etc., can solve the problems of increasing process steps and raw materials, etc., and achieve the effect of solving the problem of debris, smooth hanging coating and strong adhesion
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Embodiment 1
[0023] Preparation of liquid wax: Weigh Crystalbond 509 strong adhesive and acetone according to the ratio of 20g: 50ml, place them in a vessel, seal the vessel, and put it in a water bath at 60°C until Crystalbond 509 strong adhesive is completely dissolved to obtain The liquid wax of the present invention.
[0024] Adopt the application of the liquid wax that makes by embodiment 1 in GaAs MMIC thinning process:
[0025] 1) Evenly coat electron beam photoresist on the front side of the GaAs substrate, such as figure 1 shown. The electron beam photoresist is PMMA-A11 photoresist, the speed of the coating table is 1500 rpm, the time is 1min, the number of times of coating is 3 times, the thickness of the coating is about 5um, and the baking condition is 180 ℃ hot Plates were heated for 3 min.
[0026] 2) On the electron beam photoresist, evenly coat the liquid wax prepared by embodiment 1, such as figure 2 As shown; Among them, the speed of the glue leveling table is 1500...
Embodiment 2
[0034] Take by weighing Crystalbond 509 strong adhesive and acetone according to the proportioning ratio of 10g: 40ml, they are placed in vessel, airtight vessel, until Crystalbond 509 strong adhesive is all dissolved under 50 ℃ of water bath conditions, obtain the present invention liquid wax.
Embodiment 3
[0036] Take by weighing Crystalbond 509 strong adhesive and acetone by the proportioning ratio of 30g: 60ml, they are placed in vessel, airtight vessel, until Crystalbond 509 strong adhesive is all dissolved under 50 ℃ of water bath conditions, obtain the present invention liquid wax.
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