Three-dimensional scanning microscope and fringe projection three-dimensional scanning method

Abstract

The invention provides a three-dimensional scanning microscope and a method for three-dimensional scanning of fringe projection. A fringe projection device with a synchronous trigger mode and an accurate pixel corresponding mode installed on a stereo microscope and a fringe acquisition device with a synchronous trigger are used for projection and shooting respectively, and the fringe projection The sequence of fringe patterns projected by the device is projected on the surface of the object to be observed through the internal fringe projection optical path of the stereo microscope, and then projected on the surface of the object to be observed. , making projection and shooting more efficient. When the fringe projection device with the precise pixel corresponding mode projects the sequential fringe pattern, the characteristics of the projected fringe pattern are better, and the pattern deformation can be avoided better. The device and the above method are used to perform fringe projection, capture and photograph, and analyze and process the collected information, so as to realize three-dimensional scanning of the surface topography of the observed object.

Description

technical field [0001] The invention relates to a three-dimensional scanning microscope and a fringe projection scanning method, in particular to a three-dimensional scanning microscope and a fringe projection three-dimensional scanning method, and belongs to the field of three-dimensional scanning devices and methods. Background technique [0002] The sinusoidal characteristics of sinusoidal fringes and the position accuracy of square wave fringes in surface structured light 3D scanning technology are crucial to the measurement accuracy, which is particularly prominent in surface structured light microscopic 3D scanning. On the one hand, most of the projection devices in the prior art are in the video projection mode. Since the projection pixels cannot correspond to the physical pixels one by one, the stripes projected by the projector are stripes corresponding to inaccurate pixels; each stripe image collected by the camera is actually a projector Combination of projected m...

AI Technical Summary

Problems solved by technology

On the one hand, most of the projection devices in the prior art are in the video projection mode. Since the projection pixels cannot correspond to the physical pixels one by one, the stripes projected by the projector are stripes corresponding to inaccurate pixels; each stripe image collected by the camera is actually a projector Combination of projected multi-frame fringe images, assuming that the frame rate of the video projector is 60, and the exposure time of the camera is 1 second, then the fringe image is actually an image composed of 60 consecutive projections within 1 second, because Due to the influence of the structure of the projector, there will be slight differences in the position of the fringe images of the 60 projections, thus affecting the position accuracy of the projected square wave fringe patterns and the sinusoidal characteristics of the sinusoidal fringes; on the other hand, due to the surface of the observed object The microstructure destroys the sinusoidal characteristics of the collected sinusoidal fringe images, so it is necessary to project multiple frames of fringe images to improve the sinusoidal characteristics of the collected fringe images

However, due to the video projector and the video camera, the connection between the two is realized by a computer, that is, the projection of the projector and the collection of the camera are controlled by a computer program. Since the computer cannot know when the projector completes the projection, in order to ensure the balance between projection and collection Synchronization, the computer often synchronizes the camera shooting through software waiting. Although the single waiting time is short, the accumulated time of multiple projection acquisitions will significantly reduce the scanning efficiency

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