Scan Synchronization Method in Interferometry

Abstract

The present invention relates to a scanning synchronization method in an interferometry. It includes a vibration signal generating step, a third vibration signal generating step, a vibration step, an image trigger generation step, and an applying step. The vibration signal generating step generates a first vibration signal with constant period for vibrating an object, and a second vibration signal of a pulsed waveform synchronized with the first vibration signal. The vibration step vibrates the object by using the first vibration signal. The third vibration signal generating step generates a third vibration signal which is delayed with a constant phase value according to the integer time of the period of the second vibration signal. The image trigger generation step generates an image trigger signal by sampling the third vibration signal according to the pulse delayed in the third vibration signal. The applying step applies an image trigger signal to the image obtaining part to obtain the image of the object. Therefore, while the object vibrates, the image of the object with different phase can be obtained.

Description

technical field [0001] The present invention relates to scan synchronization methods in interferometry, and more particularly to scan synchronization methods in interferometry for accurately measuring the shape of objects with dynamic properties. Background technique [0002] An interferometer is a tool that produces interference fringes caused by reflected or transmitted two beams of light after the light is emitted onto the reference surface and surface of the object to be measured, and obtains information about the object by measuring and analyzing the interference fringes. information about the surface shape. [0003] Such interferometers have been widely used in industry due to the ease of measuring the shape of objects. Recently, the rapid development of technology throughout the entire industrial field has brought about microfabrication in the fields of semiconductors, microelectromechanical systems (MEMS), flat panel displays, optical elements, etc., and is currentl...

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Problems solved by technology

[0007] However, there are problems: if a laser source is used, it increases the cost of manufacturing the interferometer; if an optical shutter is used, the response speed becomes slower; and if an AOM is used, it is difficult to align the light and the amount of light decreases

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