Dual-arm sweeping interferometer system
An interferometer and dual-arm technology, which is applied in the field of dual-arm sweep-pendulum interferometer systems, can solve problems such as lateral displacement, and achieve the effects of easy calibration, easy implementation, and reduced complexity
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Embodiment 1
[0013] Such as Figure 1-5 As shown, as a preferred embodiment of the present invention, the base 40 is provided with a rotating platform 20, the rotating platform 20 is driven to rotate by a drive unit, and the first and second mirrors 21, 22 are installed on the rotating platform 20 and are placed on both sides of the rotating platform 20. In this embodiment, the two mirrors rotate around the same shaft, which can easily control the synchronous action of the two mirrors, greatly simplifying the transmission structure.
[0014] Further, when the rotating platform 20 swings to the middle position, the beam splitter 10 is located on the symmetrical plane between the first and second reflecting mirrors 21 and 22 . The rotation center of the rotating platform 20 is located on the symmetrical plane between the first and second reflecting mirrors 21 and 22 . The device structure of the invention has symmetry, which makes the system stable and reliable, and insensitive to temperat...
Embodiment 2
[0023] The first and second reflectors 21, 22 are rotationally connected to the base 40 through a rotating shaft 25, 26 respectively, and the rotation angle and direction of the two mirrors are synchronized. Compared with embodiment 1, this embodiment is only different in the way of rotation of the first and second mirrors, and other structures are basically the same as embodiment 1.
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