Device and method for surface damage detection of large-aperture optical components
A technology for optical components and surface damage, which is applied in the field of optical components, can solve problems such as difficult assembly and disassembly, difficult surface damage detection of large-diameter components, consistent magnification and strict adverse effects of imaging, and achieves easy integration, simple structure, and fast The effect of accurate detection
Active Publication Date: 2017-12-12
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The optical components to be tested used online in the system are not easy to install and disassemble because they have been installed and calibrated, and it is difficult to realize the surface damage detection of large-diameter components by moving the components to be tested
For the way of moving the CCD, the corresponding imaging system must also move, which will have an adverse effect on ensuring the consistency of magnification and strict imaging
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0024] The present invention will be further described below in conjunction with example and accompanying drawing.
[0025] Such as figure 1 Shown is the large-diameter optical element surface damage detection device of the present invention. The device includes: an illumination source 1, a large-diameter optical element seat 2, an imaging lens 3, a two-dimensional vibrating mirror 4, a CCD camera 5, and a computer 6. The positions of the above components The relationship is as follows:
[0026] Along the output beam direction of the illumination light source 1 are the large-aperture optical element seat 2, the imaging lens 3 and the two-dimensional vibrating mirror 4 in sequence, and on the optical axis of the reflected light of the two-dimensional vibrating mirror 4 are the Described CCD camera 5, the surface to be detected of the optical element on the described large-aperture optical element seat 2 and described CCD camera 5 are respectively positioned at the object plane...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A device and method for surface damage detection of a large-diameter optical element, the device comprising: an illumination light source, a large-diameter optical element seat, an imaging lens, a two-dimensional vibrating mirror, a CCD camera, and a computer. The present invention uses a vibrating mirror scanning method to detect optical elements The method of surface damage can realize the scanning of different positions of the optical element without spatially moving the element under test, which saves a lot of space, and makes the detection system simple in structure and easy to integrate. The large-diameter component damage detection device and method based on the scanning method of the galvanometer can realize scanning acquisition of damage images of different positions of the large-diameter component, and splicing to obtain a complete damage image of the large-diameter component. This method requires the resolution of the CCD It is relatively low, and the splicing method is simple, which can quickly and accurately complete the detection of damage to large-diameter components.
Description
technical field [0001] The invention relates to an optical element, in particular to a device and method for detecting surface damage of a large-diameter optical element. Background technique [0002] With the development of large-aperture and high-flux-density ICF laser drivers, the load capacity of optical components has become an important factor limiting the performance improvement of laser drives. The main factor affecting the load capacity of optical components is the damage of laser-induced components. Detecting surface damage of optical components can ensure safe and stable operation of the system. [0003] The easiest way to monitor component surface damage is to observe directly with the naked eye. However, since the minimum size of the naked eye is on the order of hundreds of microns, it is difficult to observe smaller-sized damage, which is random and uncertain. Moreover, in the ICF laser driver system, many optical components are in a vacuum-tight environment, ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/958
Inventor 郭亚晶朱宝强唐顺兴姜秀青刘亚群陈欣
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI