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Non-contact type high-precision three-dimensional measurement method and measurement device for complex optical surface shapes

A non-contact, three-dimensional measurement technology, used in measuring devices, optical devices, instruments, etc., can solve the problems of low precision, high measurement cost, three-dimensional measurement of optical components, and achieve low-cost, easy-to-operate Effect

Active Publication Date: 2015-12-16
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the problems of high measurement cost, low precision and inability to realize three-dimensional measurement of the surface shape of the optical element in the existing method for measuring the surface shape of the optical element, the present invention provides a non-contact complex optical surface shape high-precision three-dimensional measurement method and measuring device

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  • Non-contact type high-precision three-dimensional measurement method and measurement device for complex optical surface shapes

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specific Embodiment approach 1

[0018] Specific Embodiments 1. A non-contact complex optical surface shape high-precision three-dimensional measurement method, which is implemented by the following steps:

[0019] 1. Use the autocollimation theodolite to aim at the spectral confocal sensor 3, the miniature three-beam interferometer 4, and the standard flat mirror 5, respectively, and adjust the attitude of the three so that they point in the same direction;

[0020] 2. Install the optical element 6 to be tested on the test platform, use a level to assist in adjusting the attitude of the sample, and eliminate errors such as tilt; according to the measurement requirements and the size of the optical element to be tested, determine the scanning parameters such as the number of scanning measurement points N and the spacing d; Set the three-dimensional translation stage 2 to move to the scanning start point (x 0 ,y 0 ), moving in the front-back direction z makes the spectral confocal sensor 3 focus on this point...

specific Embodiment approach 2

[0025] Specific embodiment two, combine figure 1 Describe this embodiment, this embodiment is the measurement device of the non-contact complex optical surface shape high-precision three-dimensional measurement method described in the first embodiment, the device includes a measurement platform 1, a spectral confocal sensor 3, a three-dimensional translation stage 2, Miniature three-beam interferometer 4 and standard plane reflector 5; Described spectral confocal sensor 3 and miniature three-beam interferometer 4 are fixed on three-dimensional translation stage 2; Described three-dimensional translation stage 2 and standard plane reflector 5 are fixed on measurement on platform 2.

[0026] The measuring platform 1 described in this embodiment adopts a stainless steel air-floating platform, and the surface of the standard plane mirror 5 is coated with an aluminum film.

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Abstract

The invention discloses a non-contact type high-precision three-dimensional measurement method and a measurement device for complex optical surface shapes and relates to the technical field of optical surface shape detection, which solves the problems in the prior art that existing measurement methods for the surface shapes of optical elements are high in measurement cost and low in precision and cannot realize the three-dimensional measurement on the surface shapes of optical elements. According to the technical scheme of the invention, the two-dimensional distribution of the height information of an optical surface is acquired through the non-contact three-dimensional coordinate position scanning process, and then the surface shape or the profile information of the optical surface can be measured. A three-dimensional translation platform conducts the translational motion in the x-y direction to realize the point-by-point scanning process of the optical surface, so that the height h variation of the optical surface over all scanning points can be measured. During the scanning process, along with the height h variation of the optical surface, the three-dimensional translation platform is moved in the z direction, so that a spectrum confocal sensor is enabled to always focus the surface of a to-be-measured optical element. A micro three-beam interferometer is aligned with a standard planar mirror. The distance between the surface of the to-be-measured optical element and the standard planar mirror is measured in real time, so that the surface shape information of the to-be-measured optical element can be obtained. The measurement device is low in cost and easy in operation.

Description

technical field [0001] The invention relates to the technical field of optical surface shape detection, in particular to a non-contact high-precision three-dimensional measuring device and method for complex optical surface shape. Background technique [0002] Driven by urgent needs and technological progress, more and more optical components with complex surface shapes are used in optical systems. Complex surface optical elements have more degrees of freedom, which can effectively correct various advanced aberrations, simplify the structure of the optical system, and improve the performance of the optical system. Complex surface optical components are of great significance to the development of modern optical systems, and are widely used in various types of optical imaging, optical detection, and photoelectric countermeasure systems. [0003] Optical surface shape measurement methods are divided into interferometry and profile scanning measurement. Compensation mirrors an...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 何玲平陈波刘世界
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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