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Substrate deposition system, robot transfer device and method for manufacturing electronic devices

A technology of electronic devices and manipulators, applied in mechanical equipment, manipulators, program-controlled manipulators, etc., can solve problems such as increasing production gains

Active Publication Date: 2020-04-07
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

While such existing systems and equipment include sufficient throughput, increased yield gains are also sought

Method used

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  • Substrate deposition system, robot transfer device and method for manufacturing electronic devices
  • Substrate deposition system, robot transfer device and method for manufacturing electronic devices
  • Substrate deposition system, robot transfer device and method for manufacturing electronic devices

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Embodiment Construction

[0027] Electronic device manufacturing can require very precise and rapid transport of substrates between locations. Specifically, in some embodiments, an end effector (sometimes referred to as a "blade") can be attached to the arm of the robot and can be adapted to transport substrates placed on the end effector into and out of the electronics processing system chamber. Such electronic device manufacturing systems may include multi-axis manipulators disposed in the transfer chamber, the multi-axis manipulators including such end effectors. This allows a first substrate to be removed from the chamber and then replaced with a second wafer at the same chamber. The goal is to achieve this transfer as quickly as possible. However, existing multi-axis robots may not be able to transfer without substantial movement of other robots. These extra moves increase the possible overall transfer speed. Furthermore, existing manipulators can be limited in the manner in which they can ent...

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Abstract

Electronic device processing systems may include a mainframe housing having a transfer chamber, a first carousel assembly, a second carousel assembly, a first load lock, a second load lock, and a robot adapted to operate in the transfer chamber to exchange substrates between the first and second carousels and the first and second load locks. The robot may include first and second end effectors operable to extend and / or retract simultaneously or sequentially along substantially co-parallel lines of action. Methods and multi-axis robots for transporting substrates are described, as are numerous other aspects.

Description

[0001] Related applications [0002] This application claims priority to U.S. Provisional Patent Application Serial No. 61 / 879,076, filed September 17, 2013, entitled "SUBSTRATEDEPOSITION SYSTEMS, ROBOT TRANSFER APPARATUS, AND METHODS FOR ELECTRONIC DEVICEMANUFACTURING" (Attorney Case No. 20666USAL03 / FEG / SYNX), and U.S. Provisional Patent Application Serial No. 61 / 868,795, filed on August 22, 2013, entitled "SUBSTRATE DEPOSITION SYSTEMS, ROBOTTRANSFER APPARATUS, AND METHODS FOR ELECTRONIC DEVICE MANUFACTURING" (Proxy 20666USAL02 / FEG / SYNX), and U.S. Provisional Patent Application Serial No. 61 / 787,117, filed March 15, 2013, entitled "SUBSTRATE DEPOSITION SYSTEMS, APPARATUS AND METHODS FORELECTRONIC DEVICE MANUFACTURING" (Attorney's Case No. 20666 USA L / FEG / SYNX / CROC), all of which are hereby incorporated by reference in their entirety for all purposes. technical field [0003] The present invention relates to electronic device manufacturing, and more particularly to apparatus,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677B65G49/07B25J9/04H01L21/205
CPCB25J9/043B25J11/0095H01L21/67161H01L21/6719H01L21/67196H01L21/67201H01L21/67742Y10S901/29Y10T74/20305B25J9/1682
Inventor 威廉·T·韦弗小马尔科姆·N·丹尼尔罗伯特·B·沃帕特杰森·M·沙勒雅各布·纽曼迪内士·卡纳瓦德安德鲁·J·康斯坦特斯特芬·C·希克森杰弗里·C·赫金斯马文·L·弗雷曼
Owner APPLIED MATERIALS INC