A Fast Method for Determining Secondary Electron Yield in Regular Slots
A secondary electron and regular technology, which is applied in the direction of material analysis by measuring secondary emissions, can solve the problems of complex output of secondary electrons, complex calculation, long simulation time, etc.
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Embodiment 1
[0046] Energy p = 300eV electron vertical incidence (θ in =0) Periodic rectangular grooves are etched on the copper surface (groove depth H=10 μm, groove width W=20 μm, groove wall width L=70 μm), and the secondary electron yield δ of 300 eV electrons incident on the smooth plane of the copper material s (E p ) = δ s (300eV) = 1.11277;
[0047] Select the coordinate axis origin at the center position of the rectangular groove bottom, according to the coordinate axis definition of claim 1 step (1), as figure 1 shown.
[0048] (1) The cross-section of the rectangular groove in the xy plane is connected by 3 line segments in sequence, and the lengths of the 3 line segments from left to right are: the left side wall L of the groove 1 =H=10μm, groove bottom L 2 =W=20μm, the right side wall L of the groove 3 =H=10μm, the angle between each line segment from left to right and the positive direction of x-axis is
[0049] (2) Electron vertical incidence (θ in =0), only the ...
Embodiment 2
[0061] Energy p = 300eV electron vertical incidence (θ in =0) Copper surface is etched with isosceles triangular groove (groove depth H=10μm, half angle α=π / 4), the secondary electron yield δ of 300eV electrons incident on the smooth plane of copper material s (E p ) = δ s (300eV) = 1.11277
[0062] Select the origin of the coordinate axis at the center of the bottom of the isosceles triangular groove, such as Figure 4 shown.
[0063] (1) The cross section of the isosceles triangular groove in the xy plane is connected by 2 line segments in turn, and the lengths of the 2 line segments from left to right are: the left side wall of the groove Right side wall of the tank The angle between each line segment from left to right and the positive direction of the x-axis is
[0064] (2) Electron vertical incidence (θ in =0), the line segment that can intersect the incident electron beam has the left side wall and the right side wall of the triangular groove, let the line s...
Embodiment 3
[0076] Energy p =1000eV electrons are incident on the sawtooth groove of copper material from the right at 60° (the left angle of the groove α=30°, the groove depth H=10μm), and the secondary electron yield of 300eV electrons incident on the smooth plane of copper material is δ s (1000eV)
[0077] Select the origin of the coordinate axis and follow the definition in step 1 (1), such as Image 6 shown.
[0078] (1) The cross-section of the sawtooth groove in the xy plane is connected by 2 line segments in turn, and the lengths of the 2 line segments from left to right are: the left side wall of the groove L1=H / cosα, the right side wall of the groove L 2 =H, the angle between each line segment from left to right and the positive direction of x-axis is
[0079] (2) Electron with θ in =π / 3 is incident from the right side, and the position that can be irradiated can only be on the left side wall of the sawtooth groove, so that the line segment that electrons irradiate to the ...
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