Electrostatic control device for resonator nanometer beam

A static control and control device technology, applied in the direction of electrical components, impedance networks, etc., can solve problems such as resonance point offset, affecting the stability of the matching electronic equipment with the best frequency, and structural vibration instability, etc., to achieve small device size Effect

Inactive Publication Date: 2015-12-30
SHANDONG UNIV OF TECH
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  • Claims
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Problems solved by technology

[0004] Due to the small scale and small damping of the nanobeam, the structural vibration is very easy to enter a nonlinear vibration state. On the other hand, the non-planar vibration of the space leads to the migration of the resonant frequency, which will lead to the instabilit...

Method used

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  • Electrostatic control device for resonator nanometer beam
  • Electrostatic control device for resonator nanometer beam
  • Electrostatic control device for resonator nanometer beam

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Embodiment Construction

[0019] Below in conjunction with accompanying drawing and embodiment the present invention is further described:

[0020] Such as figure 1 and figure 2 As shown, a resonator nanobeam electrostatic control device consists of three parts: a driving device, a control device and a signal extraction device. The driving device includes a signal source 1, a driving electrode 2 and a nanobeam 3, wherein one end of the signal source 1 is connected to a driving Electrode 2, the other end is connected to nano-beam 3, and drive electrode 2 is located below the nano-beam, and parallel to the nano-beam, the signal source is connected in series with the drive electrode and the nano-beam; the signal source generates an AC voltage signal of , where, V is the drive voltage, V 0 is the driving voltage amplitude, ω is the driving signal frequency, t is time, the simple harmonic vibration generated by the nanobeam is , where y represents the vibration displacement, y 0 is the vibrat...

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Abstract

The invention discloses an electrostatic control device for a resonator nanometer beam. The electrostatic control device is composed of a driving device, a single extraction device and a control device. The character that the resistance value of a graphene film sensor is changed along with bending deformation of the nanometer beam is used, changed voltage signals of the graphene film sensor serve as control input signals, and nonlinear vibration of the nanometer beam is controlled through axial control force produced by an axial parallel plate controller. The electrostatic control device aims at avoiding the harmful nonlinear phenomenon caused by electrostatic driving of the resonator nanometer beam, and therefore the vibration of the nanometer beam is similarly-linear stable vibration.

Description

technical field [0001] The invention relates to a resonator nano-beam electrostatic control device, which belongs to the technical field of electronic devices. Background technique [0002] The control of the nonlinear effect of nanobeam vibration is a difficult problem that restricts the wide application of nanoelectromechanical system (NanoElectromechanicalSystem, NEMS) devices. [0003] In NEMS devices, the mechanically moving components can usually be simplified as nano-beams. Under the coupling effect of parameter excitation and external excitation, the nonlinear system response of nano-beam electrostatic coupling presents relatively rich nonlinear dynamic characteristics, which are specifically expressed as the system response With the change of system parameters, it presents a complex process of periodic, quasi-periodic and chaotic motion, and is also prone to nonlinear phenomena such as spring hardening or softening, sudden jump, hysteresis, suction instability, and ...

Claims

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Application Information

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IPC IPC(8): H03H9/24H03H9/02
Inventor 刘灿昌岳书常巩庆梅刘文晓周继磊
Owner SHANDONG UNIV OF TECH
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