Resonator nano-beam parallel plate electrostatic control device and control method thereof

Abstract

The invention discloses a resonator nano-beam parallel plate electrostatic control device and a control method thereof. The system includes three parts: a drive device, a signal extraction device and a control device. The control method includes the following steps: 1) determining the driving gap condition of the linear stable vibration of nano-beams; 2) determining the nonlinear feedback control voltage gain gf of the voltage amplifier. The invention utilizes the characteristic that the resistance of the graphene film changes with its deformation, and is used as a displacement sensor device to control the vibration of the nanobeam and the driving electrode, and solves the problem that the existing NEMS device fails due to the harmful nonlinear effect of the electrostatic drive. question.

Description

technical field [0001] The invention relates to a resonator nano-beam parallel plate electrostatic control device and a control method thereof, belonging to the technical field of electronic devices. Background technique [0002] The nonlinear effect of nanobeam vibration is a problem that restricts the wide application of Nano Electromechanical System (NEMS) devices. In NEMS devices, the mechanically moving components can usually be simplified as nano-beams. Under the coupling of parametric excitation and external excitation, the response of the nano-beam electrostatically coupled nonlinear system presents relatively rich nonlinear dynamic characteristics, specifically manifested as non-linear The linear system response shows a complex process of periodic, quasi-periodic and chaotic motion alternately evolving with the change of system parameters, and it is also prone to nonlinear phenomena such as spring hardening or softening, sudden jump, hysteresis, suction instability,...

AI Technical Summary

Problems solved by technology

In NEMS devices, the mechanically moving components can usually be simplified as nano-beams. Under the coupling of parametric excitation and external excitation, the response of the nano-beam electrostatically coupled nonlinear system presents relatively rich nonlinear dynamic characteristics, specifically manifested as non-linear The linear system response shows a complex process of periodic, quasi-periodic and chaotic motion alternately evolving with the change of system parameters, and it is also prone to nonlinear phenomena such as spring hardening or softening, sudden jump, hysteresis, suction instability, frequency drift, etc.

Due to the small scale and small damping characteristics of the nanobeam, the structural vibration is easy to enter a nonlinear vibration state. On the other hand, the non-planar vibration of the space leads to the resonant frequency shift, which will lead to the instability of the structural vibration of the resonator nanobeam. and the offset of the resonance point, which in turn affects the matching of the best frequency and the working stability of electronic equipment

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