Baking device used for removing trace of organic pollutants on surface of light machine element

Abstract

The invention provides a baking device used for removing a trace of organic pollutants on the surface of a light machine element. According to the baking device, the organic pollutants on the surface or the sub-surface of the metal or fused quartz light machine element are baked out through an infrared baking lamp in a low-vacuum baking manner, and the organic pollutants are taken out of a vacuum box through a trace of circulating air. An air filter and an AMC filter are used for the baking device, and secondary pollution of particles and organic matter in air to the surface of the light machine element is avoided. According to the baking device, by regulating vacuum pressure and baking temperature, it can be guaranteed that the organic pollutants on the surface or the sub-surface of the light machine element are removed under the condition that the performance of the light machine element is not changed, and meanwhile a high cleanliness level is achieved. The baking device has the beneficial effects that the organic pollutant removing effect is good, the structure is simple, no secondary pollution is caused, and use is easy; and the baking device can be expanded to be applicable to the fields, such as aviation and aerospace, with high requirements for cleanliness.

Description

technical field [0001] The invention belongs to the field of removing trace organic pollutants on the surface of optical mechanical components, and in particular relates to a baking device for removing trace organic pollutants on the surface of optical mechanical components. Background technique [0002] High-intensity lasers are widely used in many high-tech fields, and are an important field of research in contemporary countries. With the continuous development of strong laser technology, especially the development of inertial confinement nuclear fusion system, the power density required by each unit device of the optical system is getting higher and higher. In actual operation, due to the influence of the operating environment, the surface of fused silica optical components and metal mechanical components will cause various pollutions. Laser damage is closely related to micro-defects. Micro-defects are an important cause of laser damage. Most of the laser damage occurs f...

AI Technical Summary

Problems solved by technology

[0004] Organic pollutants are more difficult to remove due to their longer molecular chains and greater adhesion

Mechanical cleaning and laser cleaning can cause damage to the surface of optomechanical components, while ultrasonic and megasonic cleaning technologies cannot effectively remove trace organic pollutants on the surface or subsurface of optomechanical components.

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