Pressure and flow velocity multi-parameter measuring device and method based on a single Lamb wave device

A measurement device and multi-parameter technology, applied in the field of sensor measurement, can solve problems such as lack of boundary slip, and achieve the effect of pattern reusability, many patterns, and small volume

Active Publication Date: 2016-01-13
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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  • Abstract
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Problems solved by technology

[0003] However, most of the existing miniature flow sensors can only measure a single indicator of pressure or flow velocity, or use multiple sensors to measure a single fluid parameter at the same time, and the flow velocity test is mostly based on the average flow velocity in the measurement pipeline. Issues such as boundary slip, flow velocity vector field representation, and low-flow local flow velocity in scale pipes lack more in-depth research

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  • Pressure and flow velocity multi-parameter measuring device and method based on a single Lamb wave device
  • Pressure and flow velocity multi-parameter measuring device and method based on a single Lamb wave device
  • Pressure and flow velocity multi-parameter measuring device and method based on a single Lamb wave device

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Embodiment Construction

[0047] The present invention / invention will be described in further detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.

[0048] It should be understood that terms such as "having", "comprising" and "including" as used herein do not entail the presence or addition of one or more other elements or combinations thereof.

[0049] Figure 1 to Figure 7 An implementation form according to the present invention is shown, which includes:

[0050] The flow channel base 1 has a first groove 11 and a Lamb wave sensor 5 placed in the first groove;

[0051] The upper plate 2 of the flow channel is covered on the base of the flow channel. The bottom surface of the upper plate of the flow channel is provided with a fluid inlet and outlet 21 and a flow channel 22 for the fluid to flow through the surface of the Lamb wave sensor. The fluid to be tested flows into the flow channel through the flow ch...

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Abstract

The invention discloses a pressure and flow velocity multi-parameter measuring device and method based on a single Lamb wave device. The pressure and flow velocity multi-parameter measuring device comprises: a channel pedestal, which has a first groove and a Lamb wave sensor placed in the first groove; a channel upper plate, which covers the channel pedestal, wherein the bottom surface of the channel upper plate is equipped with a fluid inlet / outlet and a channel; a test circuit board, which covers the channel upper plate and is equipped with an interface that is connected to an external tester; and elastic probes, wherein one end of each elastic probe is electrically connected to the test circuit board and the other end of each elastic probe passes through the channel upper plate and keeps extending to form an elastic contact. The Lamb wave sensor is equipped with, from bottom to top, a silicon substrate layer, a ground electrode, an aluminium nitride film and an interdigital electrode in sequence. The measuring device based on a Lamb wave sensor has the characteristics of small size, high sensitivity, low loss and multiple modes. The changing magnitude and direction of pressure and flow velocity can be accurately measured by means of the characteristic that the single Lamb wave sensor has multiple modes.

Description

technical field [0001] The invention relates to the technical field of sensor measurement. More specifically, the present invention relates to a high-sensitivity multi-parameter measurement device and method for pressure and flow velocity based on a single Lamb wave device. Background technique [0002] In recent years, microchannel gas flow has become one of the hotspots in fluid mechanics research, which mainly involves the theory of fluid boundary problems, gas vibration relaxation models, and gas vortex flow. Research on micro-scale duct airflow can effectively promote the design and manufacture of core components of micro-electromechanical systems (MEMS), such as micro-heat exchangers, micro-filters, and fuel cells, and lead the development of new intelligent devices in many fields , such as micro breath analyzers, micro nozzles, micro thrusters, etc. With the development of MEMS technology, smart gas flow sensors continue to emerge, which greatly promotes the develop...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02
Inventor 周连群孔慧李传宇姚佳张威郭振
Owner SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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