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Testing method for semiconductor gas sensitive element

A technology of gas sensing element and test method, which is applied in the direction of measuring electricity, measuring device, measuring electrical variable, etc., can solve the problems of unsuitable gas test and long desorption time of sample gas.

Inactive Publication Date: 2016-01-20
DALIAN NATIONALITIES UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Usually, the static test system adopts a closed large-capacity gas chamber, which injects sample gas and mixes it uniformly in the container to form a certain volume of test gas. The equipment of this test method is relatively simple, but the sample gas on the device in the gas chamber The long desorption time is not suitable for a large number of gas tests

Method used

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  • Testing method for semiconductor gas sensitive element
  • Testing method for semiconductor gas sensitive element
  • Testing method for semiconductor gas sensitive element

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] A test method for a semiconductor gas sensor, characterized in that it comprises: the steps of building and testing a semiconductor gas sensor test system, and the step of analyzing the performance of the semiconductor gas sensor test system and the semiconductor gas sensor.

Embodiment 2

[0044] It has the same technical solution as that of Embodiment 1, and more specifically: in the steps of setting up and testing the semiconductor gas sensor test system, the semiconductor gas sensor test system is used to dynamically distribute and control different gases at a given concentration. Make the multi-sensor array monitor the change of the surface conductivity of the gas sensor in real time when the gas is introduced;

[0045] The semiconductor gas sensor testing system includes: a sampling device for automatically performing sample gas concentration ratios, a gas sensor heating and temperature measuring device, used to coordinate actions with the sampling device, and automatically collect 4 to 4 gas samples in different gas sample environments. The signal measurement and data acquisition circuit for the measurement signal of the 6-way gas sensor, the data processing circuit for data processing the collected measurement signal; and the temperature compensation circu...

Embodiment 3

[0055] It has the same technical solution as Embodiment 1 or 2, more specifically: the software part of the gas sensor testing system includes a gas circuit control module, a voltage sampling module, a temperature compensation module, a data processing module and a display function module, wherein :

[0056] The gas circuit control module sets the control parameters, and the parameters include the time before ventilation, the ventilation time, the time after gas stop, the data sampling time interval, the type of mixed gas, the concentration of various gases and the control voltage of the carrier gas. Set to control the output of multiple gas samples to achieve gas distribution. During the gas distribution process, the gas flow rate and the working temperature of the components remain unchanged throughout the test process;

[0057] The voltage sampling module controls the start of voltage sampling, sampling interruption and sampling end;

[0058] The data processing module per...

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Abstract

The invention discloses a testing method for a semiconductor gas sensitive element, and belongs to the field of element testing. The method is used for solving the problem that an existing semiconductor gas sensitive element testing method is not perfect. The testing method is technically characterized by comprising the step of assembling and testing a semiconductor gas sensor testing system and the step of analyzing the semiconductor gas sensor testing system and the performance of the semiconductor gas sensitive element. The testing method has the advantage that powerful guarantees are provided for the testing environment and the testing precision of the semiconductor gas sensitive element.

Description

technical field [0001] The invention belongs to the field of testing semiconductor sensitive elements, in particular to a method for testing semiconductor gas sensitive elements. Background technique [0002] When the development of semiconductor gas sensor technology is in full swing, the development of semiconductor gas sensor testing technology has not kept pace with the development of gas sensor technology. Human beings' understanding and transformation of the objective world are often based on testing work. Engineering testing technology is a new technology that uses modern testing methods to detect, test, and analyze various signals in engineering, especially dynamic physical signals that change with time, and extract useful information from them. The results of its measurement and analysis objectively describe the state, changes and characteristics of the research object, and provide a reliable basis for further transformation and control of the research object. Sim...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00G06N3/02
CPCG01N27/122G01N35/00G01R31/2829
Inventor 杜海英孙炎辉王述刚
Owner DALIAN NATIONALITIES UNIVERSITY
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