Tail gas treatment device for treating process exhaust gas of LED MOCVD equipment

An exhaust gas treatment and process technology, which is applied in the field of exhaust gas treatment devices to avoid excessively high local combustion temperature, ensure safety, and prevent tempering

Inactive Publication Date: 2016-01-27
SHANGHAI XIEWEI PRECISION MACHINERY
View PDF5 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention intends to solve the above problems existing in the traditional tail gas treatment device when dealing with large flow H2 and NH3

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Tail gas treatment device for treating process exhaust gas of LED MOCVD equipment
  • Tail gas treatment device for treating process exhaust gas of LED MOCVD equipment
  • Tail gas treatment device for treating process exhaust gas of LED MOCVD equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0048] The specific implementation manners of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0049] A tail gas treatment device for treating process waste gas of LEDMOCVD equipment, characterized in that it includes a combustion chamber for burning waste gas and a heating belt wrapping the combustion chamber, and the combustion chamber includes annular nested outer Cavity and inner cavity; the nested outer cavity and inner cavity have a common top end cover, and the end cover locks the outer cavity and inner cavity together through screws and gaskets; the outer wall of the outer cavity is equipped with Two embracing heating bands wrap the entire outer cavity.

[0050] Such as figure 1 As shown, the present invention 100 comprises a combustion chamber 200 and a heating belt 400 wrapping the combustion chamber, 300 represents the end cover of the combustion chamber 200, and 500 represents a cooling structure connec...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

A tail gas treatment device for treating process exhaust gas of LED MOCVD equipment comprises a combustion chamber for combusting exhaust gas and a heating tape for packaging the combustion chamber. The combustion chamber comprises an outer chamber and an inner chamber which are annularly nested together. The outer chamber and the inner chamber which are nested together have a common top end cap. The end cap locks the outer chamber and the inner chamber together through screws and a sealing pad. The outer wall of the outer chamber is provided with two surrounding type heating tape. The heating tape packages the whole outer chamber. The tail gas treatment device sufficiently utilizes combustion heat and realizes relatively small amount of consumed electric energy. The tail gas treatment device has advantages of high safety, thorough combustion and no waste water through combusting the waste gases of H2 and NH3, energy-saving and environment-friendly performance, low cost, long maintenance period, simple structure and easy mounting.

Description

technical field [0001] The invention belongs to the field of environmental protection and energy saving, and relates to a tail gas treatment device for treating process waste gas of LEDMOCVD equipment. Background technique [0002] With the extensive application of LEDs in the field of FPD backlights and the broad market prospects of LED lighting, the investment in LED manufacturing, especially blue LEDs, has been even greater in recent years. Explosive growth. According to the previous MOCVD process experience, the traditional tail gas treatment method has proved to have many disadvantages in the treatment of the large flow of H2 and NH3 (at least H2200slm and NH3100slm in a single process reaction chamber) left by the MOCVD process. [0003] 1) Washing treatment method. It just takes advantage of the high water solubility of NH3 to absorb ammonia gas to form ammonia water. The ammonia water must be neutralized with a large amount of acid, and a huge amount of ammonium sa...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): F23G7/06
Inventor 郑洪王福清车薛东肖陶叶建伟王晓琳
Owner SHANGHAI XIEWEI PRECISION MACHINERY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap