Selfcalibration of Capacitive Pressure Sensors with Electrostatic Forces

A pressure sensor, electrostatic force technology, applied in the direction of measuring fluid pressure through electromagnetic components, force/torque/work meter calibration/testing, measuring fluid pressure, etc.

Active Publication Date: 2016-01-27
INFINEON TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This calibration and further recalibration can include a variety of different pressure

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  • Selfcalibration of Capacitive Pressure Sensors with Electrostatic Forces
  • Selfcalibration of Capacitive Pressure Sensors with Electrostatic Forces
  • Selfcalibration of Capacitive Pressure Sensors with Electrostatic Forces

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Embodiment Construction

[0018] The present invention will now be described with reference to the accompanying drawings, wherein like reference numerals are used to refer to like elements throughout, and wherein the illustrated structures and devices are not necessarily drawn to scale. As used herein, the terms "component," "system," "interface," etc., are intended to refer to computer-related entities, hardware, software (eg, for execution), and / or firmware. For example, a component may be a processor, a process running on a processor, an object, an executable, a storage device, and / or a computer with a processing device. By way of illustration, applications running on servers and servers can also be components. One or more components can reside within a process and a component can be localized on one computer and / or distributed between two or more computers.

[0019] In addition, these components can execute from various computer readable storage media having various data structures stored thereon,...

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Abstract

The present invention relates to a selfcalibration of capacitive pressure sensors with electrostatic forces. A pressure sensor calibration system comprises one or more pressures sensors for calibrating sensor parameters based on a membrane deflection or a membrane displacement from an electrostatic force. A measuring component measures capacitance values corresponding to applied voltages at the electrodes of the one or more pressure sensors. Sensor parameters are derived from capacitance measurements and a pressure measurement, which are utilized by a calibration component for calibration and recalibration of the one or more pressure sensors.

Description

technical field [0001] The present disclosure relates to the field of pressure sensors, and more particularly to the calibration and recalibration of pressure sensors using one or more electrostatic forces. Background technique [0002] Capacitive pressure sensors use a movable diaphragm and a pressure cavity to create a variable capacitor. A variable capacitor exhibits a capacitance that changes corresponding to the force induced by the measured pressure. For integration of sensor units into electronic devices, these sensor units are usually connected to form arrays or bridges, however from a system point of view the network of units still behaves like a single sensor. Initially at the end of the manufacturing process or manufacturing line, the sensor is usually calibrated under defined measurement conditions. This calibration and further recalibration may include various pressures at different temperatures, which would utilize specialized test equipment and significant t...

Claims

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Application Information

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IPC IPC(8): G01L25/00
CPCG01L27/005G01L9/0073
Inventor D·哈默施密特
Owner INFINEON TECH AG
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