Multi-shaft structure of electronic system
An electronic system and shaft structure technology, applied in the direction of multi-dimensional acceleration measurement, measuring devices, instruments, etc., to achieve scientific and reasonable structure and design, high degree of digitization, and good speed regulation effect
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[0011] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.
[0012] As shown in the figure: a multi-axis structure of an electronic system in this embodiment includes an electrostatic vibrator 1, an electrostatic actuator 2, and a substrate 3. The electrostatic vibrator 1 is provided with an electrostatic actuator 2, and the upper end of the electrostatic vibrator 1 is The lower end of the substrate 3 is connected, the upper end of the substrate 3 is connected to the lower end of the insulating film 4, the upper end of the insulating film 4 is connected to the input end of the base layer 5, the base layer 5 is arranged at the lower end of the protective film 6, and the lower end of the protective film 6 is provided with a MEMS structure 7, The lower end of the MEMS structure 7...
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