Steady flow device
A technology of flow stabilizing device and buffer part, which is applied in the directions of flow control, instrument, control/regulation system, etc., can solve the problems of stable liquid output morphology and achieve the effect of stable morphology
Active Publication Date: 2020-02-14
ACM RES SHANGHAI
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Problems solved by technology
Therefore, it is difficult for the existing liquid supply device to stabilize the liquid output shape
Method used
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[0017] In order to describe the technical content, structural features, goals and effects of the present invention in detail, the following will be described in detail in conjunction with the embodiments and drawings.
[0018] refer to Figure 4 as shown, Figure 4 A schematic cross-sectional structure diagram of an embodiment of the flow stabilizing device of the present invention is disclosed. like Figure 4 As shown, the flow stabilization device includes a buffer portion 41 , an output end portion 42 and an elastic connector 43 . The buffer part 41 has a buffer cavity 411 , a liquid inlet 412 with a liquid inlet and a liquid outlet 413 with a liquid outlet, wherein the diameter of the liquid inlet of the buffer 41 is smaller than the diameter of the liquid outlet. The output end 42 is located on one side of the liquid outlet 413 of the buffer 41, and the output end 42 is connected with the liquid outlet 413 of the buffer 41 through the elastic connector 43, and the elas...
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The invention discloses a current stabilizer. The current stabilizer comprises a buffer portion, an output terminal portion and an elastic connecting component. The buffer portion possesses a cushion chamber, a liquid inlet end provided with a liquid inlet and a liquid outlet end provide with a liquid outlet. The output terminal portion is located on one side of the liquid outlet end of the buffer portion and possesses an outlet. The elastic connecting component connects the output terminal portion and the liquid outlet end of the buffer portion. A gap is arranged between the output terminal portion and the liquid outlet end of the buffer portion. The size of the gap is adjusted through extending and retraction of the elastic connecting component. A part of liquid in the cushion chamber is output from the outlet of the output terminal portion and another part of the liquid is overflowed from the gap. When the output terminal portion is extruded by the liquid, the elastic connecting component is stretched, the gap between the output terminal portion and the liquid outlet end of the buffer portion becomes large and an amount of the overflowed liquid through the gap is increased. When the output terminal portion is extruded by the liquid and becomes small, the elastic connecting component is contracted, the gap between the output terminal portion and the liquid outlet end of the buffer portion becomes small and an amount of the overflowed liquid through the gap is decreased.
Description
technical field [0001] The invention relates to the field of components in semiconductor equipment, in particular to a flow stabilizing device for maintaining stable liquid output. Background technique [0002] In modern industrial production, most require liquid output to have a stable shape. However, due to the lack of corresponding design of the existing liquid supply device, it is difficult to guarantee this point. like figure 1 as shown, figure 1 The structure of the existing liquid supply device is exemplified. The existing liquid supply device includes a buffer chamber 101 , an output end 102 and a liquid supply pump 103 . The liquid inlet end of the buffer chamber 101 is connected to the output end of the liquid supply pump 103 through an L-shaped pipe, and the liquid outlet end of the buffer chamber 101 is connected to the output end 102 . The liquid is pumped out by the liquid supply pump 103 , flows into the buffer chamber 101 through the pipeline, and then f...
Claims
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IPC IPC(8): G05D7/00
Inventor 代迎伟金一诺王坚王晖
Owner ACM RES SHANGHAI