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Method for making step plate for measuring transfer function of interferometer

A technology of transfer function and production method, applied in the field of interferometer, can solve the problems of long production cycle and complex production process, and achieve the effects of high production cost, simple process and high difficulty

Active Publication Date: 2018-05-08
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to ensure the accuracy of the transfer function measurement results, when measuring the transfer function of the interferometer, it is necessary to analyze the influence of different heights and different calibers on the measurement results. Multiple step plates are required. For example, using etching to make step plates, the manufacturing process is complicated and the production cycle long

Method used

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  • Method for making step plate for measuring transfer function of interferometer
  • Method for making step plate for measuring transfer function of interferometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Example 1: Preparation of a stepped plate with a diameter of 30mm and a step height of 30nm by the knife-edge mask coating method

[0021] Prepare the base fixture:

[0022] ① The basic fixture is assembled by a tooling fixture 1 and a blade 2. The tooling fixture 1 is a circular aluminum plate with a concentric circular groove 5. The diameter of the circular groove is 30 mm, and The diameter is the same, the circular groove is bounded by the diameter passing through the center of the circle, half of the circle is transparent and bottomless, the other half of the circle has a bottom, the bottom thickness is 0.5mm, and the depth of the half circle with the bottom is lower than that of the quartz glass substrate to be coated. The thickness is less than 1mm. On the circular aluminum plate on the side of the semicircle with a bottom of the fixture 1, there are a first wire cutting groove 3 and a second wire cutting groove 4 parallel to the edge of the semicircle diameter. ...

Embodiment 2

[0026] Example 2: Preparation of a stepped plate with a diameter of 50 mm and a step height of 50 nm by the knife-edge mask coating method

[0027] Prepare the base fixture:

[0028] ① The basic fixture is assembled by a tooling fixture 1 and a blade 2. The tooling fixture 1 is a circular aluminum plate with a concentric circular groove 5. The diameter is the same, the circular groove is bounded by the diameter passing through the center of the circle, half of the circle is transparent and bottomless, the other half of the circle has a bottom, the bottom thickness is 0.75mm, and the depth of the bottom side of the semicircle is lower than that of the quartz glass substrate to be coated. The thickness is less than 1.5mm. On the circular aluminum plate on the side of the semicircle with bottom of the fixture 1, there are first wire cutting grooves 3 and second wire cutting grooves 4 parallel to the diameter edge of the semicircle. The distance between the cutting groove and the...

Embodiment 3

[0032] Example 3: Preparation of a stepped plate with a diameter of 100mm and a step height of 100nm by the knife-edge mask coating method

[0033] Prepare the base fixture:

[0034] ① The basic fixture is assembled by a tooling fixture 1 and a blade 2. The tooling fixture 1 is a circular aluminum plate with a concentric circular groove 5. The diameter of this circular groove is 100mm, and The diameters are the same, the circular groove is bounded by the diameter passing through the center of the circle, half of the circle is transparent and bottomless, the other half of the circle has a bottom, the bottom thickness is 1mm, and the depth of the bottomed side of the semicircle is lower than that of the quartz glass substrate to be coated. Thickness less than 2mm, on the circular aluminum plate on the side of the semicircle with bottom of the said jig 1, there are a first wire cutting groove 3 and a second wire cutting groove 4 parallel to the edge of the semicircle diameter, th...

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Abstract

The invention discloses a method for manufacturing a step board for measuring a transfer function of an interferometer. The method comprises the steps: placing a quartz substrate with a 1 / 10 lambda surface shape into a film-plated clamping tool; fixing a sharp blade through two copper wires, and enabling the edge of the blade to be tightly pressed on a to-be-plated surface; and plating a half side of a to-be-plated film surface with an SiO2 film through employing a high-temperature electronic gun evaporation method. The method can be used for manufacturing step boards with different heights and diameters conveniently, can guarantee the steepness and usability of a step place, is high in precision, is high in efficiency, and is economical.

Description

technical field [0001] The invention relates to an interferometer, in particular to a method for making a step plate used for measuring the transfer function of the interferometer. Background technique [0002] Due to the development of strong laser, aerospace and astronomical observation projects, there is an urgent need for optical components used in multiple large-aperture interferometer detection systems in China. For the optical components in the powerful laser system, the surface quality is often evaluated by the method of dividing frequency bands. Among them, the error in the low frequency band uses the wavefront gradient root mean square evaluation parameter; the error in the middle frequency band uses the wavefront power spectral density evaluation parameter. These parameters need to be calculated from the wave surface results measured by the interferometer. This requires a large-aperture interferometer to have a good system transfer function. [0003] At present...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/02
CPCG01J9/02
Inventor 刘世杰方俏然周游白云波刘欢欢张志刚
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI