Micro mechanical acceleration sensitive structure for inhibiting crosstalk in high-precision single-shaft optical micro-accelerometer, and manufacturing method thereof
A technology of micro-accelerometer and sensitive structure, which is applied in the direction of velocity/acceleration/shock measurement, measurement acceleration, measurement device, etc., to achieve the effects of eliminating sensitive axial displacement and rotation, large acceleration-displacement sensitivity, and avoiding lobe compensation
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[0046] Hereinafter, the embodiments of the present invention will be described in detail with reference to the accompanying drawings and specific specific examples, and those skilled in the art can understand other advantages and effects of the present invention from this specification. It should be noted that the diagrams provided in this embodiment are only schematic diagrams to illustrate the basic concept of the present invention. Related components in the diagrams are not necessarily drawn according to the number, shape and size of the components in actual implementation. In actual embodiments, The shape, number, layout, and proportions of each component may be more complicated.
[0047] The micromechanical acceleration sensitive structure for suppressing crosstalk provided by the present invention is applied to a high-precision single-axis optical microaccelerometer, and the purpose is to suppress off-axis crosstalk caused by the asymmetry of the micromechanical structure, a...
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